• CN: 11-2187/TH
  • ISSN: 0577-6686

Journal of Mechanical Engineering ›› 2016, Vol. 52 ›› Issue (19): 145-153.doi: 10.3901/JME.2016.19.145

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Research and Development of Ultra-clean Manufacturing

BAI Qingshun1, GUO Yongbo1, CHEN Jiaxuan1, LU Lihua1, ZHANG Qingchun1,ZHANG Feihu1,  ZHAO Hang1,  YUAN Xiaodong2,  LIANG Yingchun1   

  1. 1. Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin 150001;
    2. Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900
  • Online:2016-10-05 Published:2016-10-05

Abstract: Manufacturing discipline is a subject that develops and changes continuously with the evolution of science and the progress of technology. The concept of ultra-clean manufacturing (UCM) is initially proposed. The intension and extension of the ultra-clean manufacturing is defined according to the demand for cleanliness in the field of laser fusion, electronics manufacturing, aeronautics, astronautics and medical device, etc. In the related fields mentioned, the evolution of the surface contamination can bring an important impact on the performance and function of the devices. On the basis of comprehensive analysis of the application field in ultra-clean manufacturing, the challenges of fundamental theory and key technology for the ultra-clean manufacturing are proposed and the essence of the surface cleanliness is analyzed. In view of the present situation of the contamination adsorption and desorption on the surface of the parts, some cases of the ultra-clean manufacturing in the related field is dissected. Finally, the scientific issues and technical approach of the ultra-clean manufacturing is proposed considering its development in the future. The aim is to present a new development idea for manufacturing science and engineering, broad and elevate its areas of application. The development of major science project and key technology area can also benefit from the research of ultra-clean manufacturing.

Key words: cleanness, contamination, manufacturing discipline, ultra-clean manufacturing