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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Research and Development of Ultra-clean Manufacturing
BAI Qingshun, GUO Yongbo, CHEN Jiaxuan, LU Lihua, ZHANG Qingchun,ZHANG Feihu, ZHAO Hang, YUAN Xiaodong, LIANG Yingchun
Journal of Mechanical Engineering . 2016, (
19
): 145 -153 . DOI: 10.3901/JME.2016.19.145
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