ANALYSES OF THE MICROSTRUCTURES OF Si3N4 FILM BY ION BEAM ENHANCED DEPOSITION

›› 1991, Vol. 27 ›› Issue (1): 72-76.

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ANALYSES OF THE MICROSTRUCTURES OF Si3N4 FILM BY ION BEAM ENHANCED DEPOSITION

Jin Zuqing;Chang Ming;Xu Shoulian;Liu Xianghuai;Zheng Shihong

The Mechanical & Electrical College under Tianjin University Shanghai Institute of Metallurgy

Published:1991-01-01

Abstract

Jin Zuqing;Chang Ming;Xu Shoulian;Liu Xianghuai;Zheng Shihong. ANALYSES OF THE MICROSTRUCTURES OF Si3N4 FILM BY ION BEAM ENHANCED DEPOSITION[J]. , 1991, 27(1): 72-76.

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ANALYSES OF THE MICROSTRUCTURES OF Si3N4 FILM BY ION BEAM ENHANCED DEPOSITION

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