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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
ANALYSES OF THE MICROSTRUCTURES OF Si3N4 FILM BY ION BEAM ENHANCED DEPOSITION
Jin Zuqing;Chang Ming;Xu Shoulian;Liu Xianghuai;Zheng Shihong
. 1991, (
1
): 72 -76 .
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