Abstract: The fully compliant mechanism is a new type of mechanism which is often used as a micro-positioning stage. However, it is very hard to make sure that the mechanism has a high positioning accuracy and a good ability of resisting the external disturbance, if the static characteristics of the mechanism as the single design objective are considered during the its structural optimization while ignoring its dynamic characteristics such as natural frequency. Thus an optimal design method of the fully compliant mechanism based on its dynamic characteristics is presented by taking a concrete fully compliant mechanism I.e. the parallel guided compliant mechanism for example. In order to realize it, the dynamic model that characterizes this mechanism is proposed to predict the first order natural frequency, and the finite element simulation is also adopted to revise the theoretic result. In addition, although the optimization for the mechanism is based on its dynamic characteristics, its static ones are also in discussion.

Key words: Compliant mechanism, Flexure hinge, Natural frequency, Structure optimization