Abstract: It is detailedly analyzed that the realization conditon and the influence factors of uniform abrasion of the lapping tool in the process of high speed plane lapping with solid abrasive, based on which the design method and procedure is proposed, and the lapping tool designed on that method is tested. The results show that a smooth surface with roughness in nm level can be readily achieved when brittle material is machined by that kind of lapping tool. For example, in the process of lapping SiC ceramic seals, not only a high quality surface with surface roughness 2~3 nm and flatness smaller than 0.8 μm, but also a high efficiency and a low cost as well as good forms of lapping tool and workpiece which can be kept for a long time can be easily obtained.

Key words: Coefficient of pressure distribution, Lapping tool, SiC ceramic seal, Uniform abrasion, Bevel gear, Envelope, Non-circular gear, Speed changing devices