The Frequency Trimming Research on Uncoated Micro-hemispherical Resonantor Using Ion Beam

doi:10.3901/JME.260248

Abstract

Abstract: Micro hemispherical resonator gyroscope (μHRG) is one of the most high-precision micro electromechanical system (MEMS) gyroscope at present, which has the significant advantages of high quality factor, good impact resistance and small size. Low-damage and high-precision mechanical tuning is one of the key technologies to improve the performance of micro-hemispherical resonant gyroscopes. Due to the large initial frequency split of the μHRG, mechanical tuning will produce a lot of dust, and preliminary mechanical tuning is needed before coating to facilitate subsequent cleaning. In view of the abnormal sensitivity to shell surface mass stiffness and decoupling of mass stiffness in specific regions of shell surface, a mechanical tuning method based on ion beam etching of the shell surface of the micro hemisphere resonantor is proposed. The problem of large frequency split of the uncoated resonator is solved. The influence of the shell surface tuning model on the frequency split of the resonant structure is analyzed by theory and simulation, and the position of the tuning center area and the tuning are determined. In addition, for the detection of the frequency split of the uncoated MHR, a planar interdigitated electrode test system is established to accurately identify the frequency split size and stiffness axis direction of the resonantor. Finally, ion beam trimming experiment is designed to verify the proposed method. The frequency split of a uncoated micro-hemispherical resonator is reduced to less than 100 mHz, considerably improves the gyroscope’s performance.

Key words: micro hemispherical resonantor, mechanical tuning, finite element simulation, ion beam trimming

CLC Number:

V241

LI Jiacheng, LU Kun, XI Xiang, SHI Yan, SUN Jiangkun, WU Xuezhong, XIAO Dingbang. The Frequency Trimming Research on Uncoated Micro-hemispherical Resonantor Using Ion Beam[J]. Journal of Mechanical Engineering, 2026, 62(5): 319-328.

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URL: http://www.cjmenet.com.cn/EN/10.3901/JME.260248

http://www.cjmenet.com.cn/EN/Y2026/V62/I5/319

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