• CN: 11-2187/TH
  • ISSN: 0577-6686

Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (13): 290-313.doi: 10.3901/JME.2023.13.290

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Recent Progress of Cleaning Technologies and Cleanliness Evaluation Methods for Metal Substrates

ZHAO Yong1, GUO Jiang1,2, FENG Jian1, WANG Qinqiang1, LONG Pengyu1, ZHANG Jinlong1, ZHANG Linwei1, WANG Shuo1, MENG Linggang2,3, JIN Zhuji1, KANG Renke1   

  1. 1. Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024;
    2. Ningbo Institute, Dalian University of Technology, Ningbo 315000;
    3. School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024
  • Received:2022-07-21 Revised:2023-03-04 Online:2023-07-05 Published:2023-08-15

Abstract: Reviewing the cleaning technologies and cleanliness evaluation methods becomes essential as the development of cleaning technologies and cleanliness evaluation methods has failed to fulfil the rising demands of the manufacturing industry. The principle, typical cases, and development status of dry and wet cleaning technologies for metal substrates are analysed. The characteristics, evaluation criteria, and application scope of qualitative and quantitative cleanliness evaluation methods are summarized. On this basis, the development trend of cleaning technologies and cleanliness evaluation methods is forecasted. The analysis shows that the efficient composite cleaning process and green cleaning technologies, the diversified cleanliness evaluation methods, and the cleanliness evaluation system for specific processes will be the significant concern of future research. In addition, improving the initial cleanliness of the substrate and attaching importance to the active cleaning technologies will be the core factor to further improve surface cleanliness. The progress of cleaning technologies and cleanliness evaluation methods were systematically reviewed from the perspective of cleaning and evaluation for metal substrates, providing a comprehensive reference for subsequent research.

Key words: cleaning technology, cleanliness evaluation method, cleaning mechanism, metal substrate

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