Calculation and Research on Bearing Performance of the Aerostatic Guideway of Two-dimensional Motion Platform

doi:10.3901/JME.2022.23.240

Abstract

Abstract: In order to further explore and study the mechanism of the aerostatic lubrication support and the bearing performance of the aerostatic guideway, a precision two-dimensional motion platform with the aerostatic lubrication support is proposed and developed. Combined with the physical model of the aerostatic guideway, the governing equations in Cartesian coordinate systems are established. The discrete difference derivation of the governing equations is carried out by the finite difference method and the flow balance principle, and the bearing performance is numerically calculated and experimentally studied by the over-relaxation iteration and the dichotomy fast search convergence interval method. The results show that the bearing performance of the aerostatic guideway is significantly affected by the type of the restrictor, and the bearing performance of the restrictor of multiple orifices is obviously better than that of the restrictor of single orifice; The higher the gas supply pressure is, the stronger the bearing performance is; Under the same conditions, the bearing performance of the combined form of the aerostatic guideway is better than that of the single form; The experimental results of the bearing performance of the aerostatic guideway are in good agreement with the numerical results, which verifies the effectiveness of the numerical calculation. The relevant research has good reference and guiding significance for promoting the research and engineering application of the aerostatic bearing and guideway in precision motion mechanism and measuring equipment.

Key words: aerostatic guideway, motion platform, bearing performance, finite difference, restrictor

CLC Number:

TH133

LU Zhiwei, LIU Xiyao, LU Han, HUANG Peng, ZHU Sida, LIU Bo, ZHANG Junan. Calculation and Research on Bearing Performance of the Aerostatic Guideway of Two-dimensional Motion Platform[J]. Journal of Mechanical Engineering, 2022, 58(23): 240-250.

References

[1] 梁迎春,陈国达,孙雅洲,等. 超精密机床研究现状与展望[J]. 哈尔滨工业大学学报,2014,46(5):28-39.LIANG Yingchun,CHEN Guoda,SUN Yazhou,et al. Research status and outlook of ultra-precision machine tool[J]. Journal of Harbin institute of Technology,2014,46(5):28-39.
[2] 李圣怡,戴一凡,王建敏. 精密和超精密机床设计理论与方法[D]. 长沙:国防科技大学出版社,2009.LI Shengyi,DAI Yifan,WANG Jianmin. Precision and ultra-precision machine tool design theory and method[D]. Changsha:National University of Defense Technology Press,2009.
[3] 杨叔子,丁汉,李斌. 高端制造装备关键技术的科学问题[J]. 机械制造与自动化,2011,40(01):1-5.YANG Shuzi,DING Han,LI Bin. Scientific problems of key technologies of high-end manufacturing equipment[J]. Machine Building & Automation,2011,40(01):1-5.
[4] 袁巨龙,张飞虎,戴一帆,等. 超精密加工领域科学技术发展研究[J]. 机械工程学报,2010,46(15):161-177.YUAN Julong,ZHANG Feihu,DAI Yifan,et al. Development research of science and technologies in ultra-precision machining field[J]. Journal of Mechanical Engineering,2010,46(15):161-177.
[5] 李圣怡. 超精密加工技术与机床的新进展[J]. 航空精密制造技术,2009,45(2):26-28.LI Shengyi. Ultra-precision machining technology and new development of machine tools[J]. Aviation Precision Manufacturing Technology,2009,45(2):26-28.
[6] 李天箭,陈宗镁,丁晓红,等. 超精密机床静压气浮导轨表面微结构设计研究[J]. 机械工程学报,2017,53(3):193-200.LI Tijian,CHEN Zongmei,DING Xiaohong,et al. Design of the aerostatic linear guideway with micro-structured surfaces for ultra precision machine tools[J]. Journal of Mechanical Engineering,2017,53(3):193-200.
[7] LUO X,CHENG K,WEBB D,et al. Design of ultra-precision machine tools with applications to manufacture of miniature and micro-components[J]. Journal of Materials Processing Technology,2005,167(2):515-528.
[8] 卢志伟,张君安,刘波. 多孔集成节流空气静压轴承数值计算与性能研究[J]. 兵工学报,2019,40(10):2151-2160.LU Zhiwei,ZHANG Junan,LIU Bo. Numerical calculation and performance study of aerostatic bearing with multi-hole integrated restrictor[J]. Acta Armamentarii,2019,40(10):2151-2160.
[9] 张雯,尹健龙,张玉冰,等. 多微通道式气体静压节流器承载力研究[J]. 机械工程学报,2012(20):139-145. ZHANG Wen,YIN Jianlong,ZHANG Yubing,et al. Research on bearing capacity of aerostatic restrictor with micro-channels[J]. Journal of Mechanical Engineering, 2012(20):139-145.
[10] QI E,FANG Z,SUN T,et al. A method for predicting hydrostatic guide error averaging effects based on three-dimensional profile error[J]. Tribology International,2016,95:279-289.
[11] LU Z W,ZHANG J A,LIU B. Research on the fluctuation of the velocity and pressure of the flow field of an aerostatic bearing with a multi-hole integrated restrictor[J]. Proceedings of the Institution of Mechanical Engineers, Part J:Journal of Engineering Tribology,2021,235(10):2007-2020.
[12] 崔海龙,岳晓斌,张连新,等. 基于数值模拟的小孔节流空气静压轴承静动态特性研究[J]. 机械工程学报,2016,52(09):116-121.CUI Hailong,YUE Xiaobin,ZHANG Lianxin,et al. Static and dynamic characteristics of aerostatic bearing based on numerical simulation[J]. Journal of Mechanical Engineering,2016,52(09):116-121.
[13] CHEN M F,LIN Y T. Static behavior and dynamic stability analysis of grooved rectangular aerostatic thrust bearings by modified resistance network method[J]. Tribology International,2002,35(5):329-338.
[14] GAO Q,LU L H,CHEN W Q,et al. A novel modeling method to investigate the performance of aerostatic spindle considering the fluid-structure interaction[J]. Tribology International,2017,115:461-469.
[15] GAO Q,CHEN W Q,LU L H,et al. Aerostatic bearings design and analysis with the application to precision engineering:State-of-the-art and future perspectives[J]. Tribology International,2019,135:1-17.
[16] 李鹏. 气浮支承微孔阵列式节流器的性能研究[D]. 华中科技大学,2011.LI Peng. Performance study of aerostatic bearings with arrayed microhole restrictors[D]. Huazhong University of Science and Technology,2011.
[17] BELFORTE G, RAPARELLI T,VIKTOROV V,et al. Discharge coefficients of orifice-type restrictor for aerostatic bearings[J]. Tribology International,2007,40(3):512-521.
[18] LI Y T,DING H. Influences of the geometrical parameters of aerostatic thrust bearing with pocketed orifice-type restrictor on its performance[J]. Tribology International,2007,40(7):1120-1126.
[19] 马武学. 并行多微通道气体静压止推轴承承载特性研究[D]. 东北林业大学,2013:51-66.MA Wuxue. Study on loading characteristic of parallel micro-channel compensated aerostatic thrust bearing[D]. Northeast Forestry University,2013:51-66.
[20] DU J J,ZHANG G Q,LIU T,et al. Improvement on load performance of externally pressurized gas journal bearings by opening pressure-equalizing grooves[J]. Tribology International,2014,73(5):156-166.
[21] CHANG S H,CHAN C W,JENG Y R. Numerical analysis of discharge coefficients in aerostatic bearings with orifice-type restrictors[J]. Tribology International,2015,90:157-163.
[22] CHEN D J,ZHOU S,HAN J H,et al. Characteristics evaluation of gas film in the aerostatic thrust bearing within rarefied effect[J]. Proceedings of the Institution of Mechanical Engineers,Part J:Journal of Engineering Tribology,2017,231(2):149-157.