Review on Viscosity Measurement Sensor Based on Micro-electromechanical Systems Technology

doi:10.3901/JME.2021.08.013

Abstract

Abstract: Viscosity has been regarded as an essential issue of fluid characteristics in a widespread field, such as biochemical engineering, since it is the basic thermal property to control the production process, ensure safe production, and conduct medical diagnosis and scientific research. In order to achieve a high-precision and high-efficiency viscosity measurement in various fields, in recent years, the viscosity measurement methods have not been limited to traditional macro measurements, such as capillary method, and rotational method. But the viscosity measurement technology under micro-nano scale has shown its outstanding development and application prospects. The rapid development of micro-electromechanical systems (MEMS) technology has promoted the viscosity measurement to integration, intelligence and real-time. Meanwhile, diversified viscosity measurement methods have continuously emerged. The resonant viscosity measurement has received extensive and in-depth attention, which has shown remarkable performance. The traditional viscosity measurement methods are briefly recalled, and then the resonant methods for viscosity determination based on micro- electromechanical system technology are introduced, with summarizing their outstanding characteristics. Finally, the development trend of viscosity measurement methods based on MEMS resonance technology is prospected.

Key words: fluid viscosity, measurement method, micro-electromechanical system, resonant vibration

CLC Number:

TP212

HUANG Linya, ZHAO Libo, LUO Guoxi, LI Zhikang, WU Dezhi, LIN Qijing, YANG Ping, JIANG Zhuangde. Review on Viscosity Measurement Sensor Based on Micro-electromechanical Systems Technology[J]. Journal of Mechanical Engineering, 2021, 57(8): 13-22.

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