Design Analysis and Optimization of Large Range Spatial Translational Compliant Micro-positioning Stage

doi:10.3901/JME.2020.17.071

Abstract

Abstract: In order to design spatial translational compliant micro-positioning stages with millimeter-scale motion range, excellent static and dynamic characteristics and various structures. Firstly, two new types of multi-degree-of-freedom and large-stroke compliant kinematic joints were designed. Then, three new types of spatial translational compliant micro-positioning stages with large motion range were designed based on these compliant kinematic joints. Next, Nonlinear method was used to modeling the force-displacement relationship, input coupling and lost motion of the stage, and compliance matrix method was used to modeling the stiffness and natural frequency of the stage. Afterwards, optimal parameter was searched to improve both static and dynamic performance of the stage. Finally, the validity of the theoretical model was proved by finite element simulation. According t o the results of both theory and simulation, the first-order natural frequency of the stage is 49.6 Hz. In 1 mm motion stroke, the lost motion in the x and z directions is less than 0.32% and 0.7%, the input coupling is less than 1.2% and the output motion is completely decoupled. It provides a systematic research method for the design, analysis and optimization of spatial translational compliant micro-positioning stages.

Key words: compliant mechanisms, large-range, structure design, nonlinear modeling, parameter optimization

CLC Number:

V414
TH122

CAO Yi, WANG Baoxing, MENG Gang, LIN Miao, ZHANG Hong. Design Analysis and Optimization of Large Range Spatial Translational Compliant Micro-positioning Stage[J]. Journal of Mechanical Engineering, 2020, 56(17): 71-81.

References

[1] HOWELL L L. Compliant mechanisms[M]. New York:John Wiley and Sons,2001.
[2] 于靖军,郝广波,陈贵敏,等.柔性机构及其应用研究进展[J]. 机械工程学报,2015,51(13):53-68. YU Jingjun,HAO Guangbo,CHEN Guimin,et al. State-of-art of compliant mechanisms and their applications[J]. Journal of Mechanical Engineering,2015,51(13):53-68.
[3] YONG Y K,MOHEIMANI S O R,KENTON B J,et al. Invited review article:High-speed flexure-guided nanopositioning:Mechanical design and control issues[J]. Review of Scientific Instruments,2012,83(12):121101.
[4] ZHU Z,TO S,ZHU W L,et al. Optimum design of a piezo-actuated triaxial compliant mechanism for nan-ocutting[J]. IEEE Transactions on Industrial Electronics,2018,65(8):6362-6371.
[5] LIN C,WU Z H,REN Y H,et al. Characteristic analysis of unidirectional multi-driven and large stroke micro-/nano-transmission platform[J]. Microsystem Technolo-gies,2017,23(8):3389-3400.
[6] WATANABE S,ANDO T. High-speed XYZ nano-positioner for scanning ion conductance microscopy[J]. Applied Physics Letters,2017,111(11):113106.
[7] 李海洋,郝广波,于靖军,等.空间平动柔性并联机构的系统设计方法研究[J].机械工程学报,2018,54(13):57-65. LI Haiyang,HAO Guangbo,YU Jingjun. et al. Systematic approach to the design of spatial translational compliant parallel mechanisms[J]. Journal of Mechanical Engineering,2018,54(13):57-65.
[8] HAO G B,LI H Y. Design of 3-legged XYZ compliant parallel manipulators with minimized parasitic rotate-ons[J]. Robotica,2015,33(4):787-806.
[9] TANG X Y,CHEN I M,LI Q. Design and nonlinear modeling of a large-displacement XYZ flexure parallel mechanism with decoupled kinematic structure[J]. Rev-iew of Scientific Instruments,2006,77(11):115101-115111.
[10] LI Y M,XU Q S. Design and optimization of an XYZ parallel micromanipulator with flexure hinges[J]. Journal of Intelligent and Robotic Systems,2009,55(4-5):377-402.
[11] LI Y M,XU Q S. A totally decoupled piezo-driven XYZ flexure parallel micropositioning stage for micro/nano-manipulation[J]. IEEE Transactions on Automation Science and Engineering,2011,8(2):265-279.
[12] YUE Y,GAO F,ZHAO X,et al. Relationship among input-force payload stiffness and displacement of a 3-DOF perpendicular parallel micro-manipulator[J]. Mechanism and Machine Theory,2010,45(5):756-771.
[13] LI H Y,HAO G B,RICHARD C,et al. A new XYZ compliant parallel mechanism for nano-manipulation:Design and analysis[J]. Micromachines,2016,7(2):23.
[14] ZHANG X Z,XU,Q S. Design,fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage[J]. Robotics and Computer-Integrated Manufacturing,2018,54:162-172.
[15] HAO G B,KONG X W. Design and modeling of a large-range modular XYZ compliant parallel manipulator using identical spatial modules[J]. Journal of Mechanisms and Robotics,2012,4(2):021009.
[16] LI Y M,WU Z G. Design,analysis and simulation of a novel 3-DOF translational micromanipulator based on the PRB model[J]. Mechanism and Machine Theory,2016,100:235-258.
[17] KOSEKI Y,TANIKAWA T,KOYACHI N,et al. Kinematic analysis of translational 3-DOF micro parallel mechanism using matrix method[J]. IEEE/RSJ Intern-ational Conference on Intelligent Robots and Systems,2000,1(3):786-792.
[18] TANG H,LI Y M. Design analysis and test of a novel 2-DOF nanopositioning system driven by dual mode[J]. IEEE Transactions on Robotics,2013,29(3):650-662.
[19] AWTAR S,PARMAR G. Design of a large range XY nanopositioning system[J]. Journal of Mechanisms and Robotics,2013,5(2):021008.
[20] MA F L,CHEN G M. Bi-BCM:A closed-form solution for fixed-guided beams in compliant mechanisms[J]. Journal of Mechanisms and Robotics,2017,9(1):014501.
[21] HERPE X,WALKER R,DUNNIGAN M,et al. On a simplified nonlinear analytical model for the characteris-ation and design optimisation of a compliant XY micro-motion stage[J]. Robotics and Computer-Integrated Manufacturing,2018,49:66-76.
[22] 杨志军,白有盾,陈新,等.基于应力刚化效应的动态特性可调微动平台设计新方法[J]. 机械工程学报,2015,51(23):153-159. YANG Zhijun,BAI Youdun,CHEN Xin,et al. A new design method of dynamic characteristics adjustable micro motion stage based on tension stiffening[J]. Journal of Mechanical Engineering,2015,51(23):153-159.