Design of the Aerostatic Linear Guideway with Micro-structured Surfaces for Ultra Precision Machine Tools
LI Tianjian1, CHEN Zongmei, CHENG Kai3
1. School of Mechanical Engineering, University of Shanghai for Science and Technology, Shanghai 200093, 2. Shanghai Institute of Spaceflight Control Technology, Shanghai 201109, 3. School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001
LI Tianjian, CHEN Zongmei, CHENG Kai. Design of the Aerostatic Linear Guideway with Micro-structured Surfaces for Ultra Precision Machine Tools[J]. Journal of Mechanical Engineering, 2017, 53(3): 193-200.