Abstract: Recently, micro-nano coordinating measuring machine(CMM) has become a research focus in the field of three-dimensional(3D) micro-nano measurement. Due to the difficulty of the development of a 3D nano probe, a novel 3D resonant trigger probe has been proposed. This probe can reach nanometer/sub-nanometer resolution in three-dimensions, and its operation principle is different from the present contact probes and optical non-contact probes. The 3D nano resonant trigger probe is constructed by a piece of piezo-electrical PVDF film, two piezo-actuators, an integrated fiber micro-stem and micro-ball tip. The PVDF film vibrates at its resonant frequency and acts as a sensor. Using the piezoelectric property of PVDF film and the high sensitivity of its resonant parameters to the micro-force, the probe can give 3D trigger signal. The probe contacts the sample in traditional tapping-mode in z direction and friction-mode in both x and y directions. Experimental results show that the trigger resolution of 3D resonant trigger positioning system constructed by the above probe, 3D nano positioning unit, the feedback control module and the signal processing circuit could reach sub-nanometer resolution, which is 0.12 nm in x direction and 0.10 nm in y direction, while 0.12 nm in z direction. The 3D repeatability error is 26 nm, 36 nm and 10 nm respectively. The results demonstrate the validity of the new type of 3D nano resonant trigger probe and positioning system.

Key words: micro-nano coordinating measuring machine, poly vinylidene fluoride(PVDF) film, three-dimensional nano probe, three-dimensional resonant trigger positioning system, three-dimensional resonant trigger probe