Abstract: Due to the several microns wide inter-electrode gap in processing, the transportation of electrolysis products is the crucial problem to the wire electrode micro-electrochemical machining. A new method is proposed that the anode is vibrated in the low frequency while the wire electrode is travelling in the processing to further enhance the efficiency of removing products and improve the processing accuracy and stability effectively. The mechanism of the processing precision influenced by products of electrolysis is explored and the influence of the anode vibration on the products of electrolysis released in the processing gap is studied. The results of the experiments show that the processing precision and stability could be improved by the increase of vibration frequency and amplitude and larger and better homogeneity slits could be fabricated in more stable processing due to the vibration of the anode.The micro-seam with the width of 4.28 μm, micro-groove and square spiral structures are successfully fabricated by the optimized parameters.

Key words: Micro electrochemical machining, Micro structure, Vibration, Wire cutting