Abstract: The traditional electrostatic converters need separated voltage source which is very difficult in the practice. A new vibration-powered electrostatic converter with the principle of work functions is presented. The design of the converter is based on MEMS technology, and adopts two kinds of different metal as the electrode plates of the capacitor. The math model is established to determine the parameters of cantilever beam. And with the aid of the finite element software, this model is tested and the dimension is modified to ensure that the electrostatic converter can work optimally. This new method gets rid of the dependence on additional voltage source. The process flow is developed and the prototype collector is successfully produced.

Key words: MEMS, Micro energy collector, Work functions