Abstract: In order to carry out optical precise assembly, a micro operation robot system of macro-micro combination, under a multi-sensor control, is developed. Based on the analysis of optical assembly principle, the system structure is presented. A 6-DOF parallel mechanism driven by alternating current servo-motors and a 5-DOF flexure hinge mechanism driven by PZTs are designed, which are respectively used in coarse positioning and fine positioning for optical parts. And a gripper driven by PZT, adopting secondary lever amplifying mechanism, is presented to hold the optical parts reliably. The multi-sensor system is established, which consists of a micro displacement detecting module, a micro vision module, a loss analyzing module, and a force sensor. According to pose information, vision information, loss information, and force information collect by the sensors, the system controls the macro/micro positioning stages to adjust accurately the pose of optical device, thereby realizing assembly automation. The experimental results show that the developed robot can successfully accomplish precise assembly of optical devices.

Key words: Coarse/fine positioning, Micro operation, Multi-sensor, Precise assembly