Abstract: In order to solve the problem of difficult prediction of the machined surface quality and the effects of machining conditions on cutting process in an economical and flexible way in ultra-precision diamond machining of microstructured surface. A dynamic simulation model for ultra-precision diamond machining of sine-wave microstructure is established. By using this model, one can not only estimate the surface topography and surface quality but also simulate the effect of cutting conditions such as the feed rate and spindle speed on the surface quality. The rerification test of the ultra-precision diamond machining of sine-wave microstructure is conducted, and a typical sine-wave microstructure with a form accuracy of 0.65 µm and surface roughness of 45 nm is manufactured. Test results show that the establishment of the dynamic simulation model has important guide significance to the machining of microstructures.

Key words: Machining simulation, Microstructure surface, Ultra-precision diamond machining