FINITE ELEMENT ANALYSIS OF THE MEMBRANE OSCILLATION OF THE PIEZOELECTRIC MICRO-PUMP

Abstract

Abstract: The micro-pump membrane is the research object. The elastic differential equations are analyzed, the model of the micro-pump membrane is established for the numerical simulation by finite element method. The oscillation modes of the micropump membrane are calculated and studied. The influence of the driven voltage, the radius ratio of the piezoelectric layer to the single wafer, the thickness of the single wafer, the thickness of the piezoelectric layer on the displacement of the micropump membrane are simulated and analyed. The results are very helpful for the optimization design of the piezoelectric micropump.

Key words: Finite element method, Pump membrane, Micro-pump, Oscillation, Piezoelectric driven

CLC Number:

TH323

WANG Liwen;GAO Dianrong;YANG Linjie;LI Yan;WANG Guangyi;FAN Zhuoli. FINITE ELEMENT ANALYSIS OF THE MEMBRANE OSCILLATION OF THE PIEZOELECTRIC MICRO-PUMP[J]. , 2006, 42(4): 230-235.

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http://www.cjmenet.com.cn/EN/Y2006/V42/I4/230

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FINITE ELEMENT ANALYSIS OF THE MEMBRANE OSCILLATION OF THE PIEZOELECTRIC MICRO-PUMP

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