THRUST DECOUPLING CONTROL OF LINEAR MOTOR DRIVER 3-DOF PLANAR MAGNETIC SUSPENSION STAGE

Abstract

Abstract: A novel planar magnetic suspension stage that has the characteristics of nonlinear, multi-variance and strong coupling is introduced. Applying the inverse system theory of nonlinear and multi-variance, a dynamics decoupling control approach is represented to this linear-motors driven stage to separate the object system into three subsystem by linear motors by state feedback linearization. At the same time, disturbance observer is used to attain the full-scale disturbances suppression. The result of simulation indicate the proposed scheme have better dynamic and static characteristics and robust.

Key words: Disturbance observer, Dynamic decoupling control, Linear motor, Planar magnetic suspension stage, Precision positioning

CLC Number:

TM921.541

Liu Dejun;Guo Qingding;Weng Xiuhua. THRUST DECOUPLING CONTROL OF LINEAR MOTOR DRIVER 3-DOF PLANAR MAGNETIC SUSPENSION STAGE[J]. , 2005, 41(1): 234-238.

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THRUST DECOUPLING CONTROL OF LINEAR MOTOR DRIVER 3-DOF PLANAR MAGNETIC SUSPENSION STAGE

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