Abstract: A novel trial solution of deflection for a multi-layer cantilever under an electrostatic load is presented. The relationship between applied voltage and deflection of the cantilever is analyzed by energy method, with effective gap spacing between the multi-layer cantilever and fixed planar electrode below the cantilever taken into account. The value of normalized deflection at the free tip of the multi-layer cantilever is obtained when pull-in phenomena occur, and analytical equation of pull-in voltage has also been obtained. The results are verified through CoSolveEM module in Coventor, showing high accuracy.

Key words: Effective gap spacing, Multi-layer cantilever, Pull-in, Trial solution