DEVELOPMENT AND PROSPECTS OF MICRO ELECTRO MECHANICAL SYSTEM

[1]

QIN Yanding, CAI Zhuocong, SHEN Yajing, HAN Jianda. Review and Prospect on the Magnetic Actuation Miniaturized Medical Robots [J]. Journal of Mechanical Engineering, 2024, 60(17): 1-21.

[2]

YUAN Weizheng, CHANG Honglong, XIE Jianbing. Advances in MEMS Integrated Design and Manufacturing Technology [J]. Journal of Mechanical Engineering, 2023, 59(19): 176-186.

[3]

HU Tengjiang, REN Wei, ZHAO Yulong, WANG Kexin. Research on High Structural Strength MEMS S & A Device for Micro Initiator [J]. Journal of Mechanical Engineering, 2022, 58(17): 206-214.

[4]

HU Tengjiang, REN Wei, ZHAO Yulong. Research Status and Development Trend of MEMS Detonators [J]. Journal of Mechanical Engineering, 2021, 57(22): 359-368.

[5]

WANG Jia, ZHANG Yunan, HAN Xu. Research on the Degradation Process and Random Shocks Modeling Based on Their Interdependency [J]. Journal of Mechanical Engineering, 2021, 57(2): 230-238.

[6]

HAO Yongping, WANG Yongjie, DONG Fulu, LU Chao. Study of Control Strategy and Software Architecture Based on Flat Type Small Parts Assembly [J]. Journal of Mechanical Engineering, 2015, 51(4): 193-198.

[7]

CHEN Xiaohui;LIU Xiaojun;ZHAO Huadong;ZHANG Jun;LU Wenlong. Novel Method for Automatic Three-dimensional Stitching of Microscopic Images of MEMS Microstructure [J]. , 2013, 49(18): 85-91.

[8]

LI Junhong;WANG Chenghao;LIU Mengwei;MA Jun;WEI Jianhui. MEMS Piezoelectric Microphone with Circular Diaphragm [J]. , 2012, 48(18): 85-88.

[9]

CUI Jiuzheng;SUN Bo;FENG Qiang. Finite Element Analysis of MEMS Package under High Impact [J]. , 2011, 47(24): 177-185.

[10]

LIU Yaxin;CHEN Liguo;SUN Lining. Non-contact Liquid Rationing System Based on Compound Intelligent Control [J]. , 2010, 46(20): 175-181.

[11]

[12]

LI Lin;GUO Yinbiao;CHEN Xuyuan. Design and Analysis of Vibration Energy Collector Based on MEMS [J]. , 2009, 45(9): 238-242.

[13]

[14]

SHEN Guangping;ZHANG Hua;WU Jian;QIN Ming;HUANG Qingan. Direct Chip Attachment Packaging of a 2-D Thermal Flow Sensor [J]. , 2009, 45(1): 218-222.

[15]

ZHANG Wenming;MENG Guang;CHEN Di. Characteristics of the Gas Journal Bearing in Micro-rotor Systems [J]. , 2008, 44(5): 25-33.

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