• CN: 11-2187/TH
  • ISSN: 0577-6686

Journal of Mechanical Engineering ›› 2026, Vol. 62 ›› Issue (13): 135-143.doi: 10.3901/JME.260307

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Six-DOF Active/passive Isolator with Integrated Piezoelectric Actuators for Micro-vibration Control

SHEN Yan1, ZHANG Yue2, XIE Xiling1, ZHANG Zhiyi1   

  1. 1. State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240;
    2. Shanghai Marine Equipment Research Institute, Shanghai 200003
  • Received:2025-07-09 Revised:2025-12-30 Published:2026-08-28

Abstract: A six-DOF active/passive isolator with integrated piezoelectric actuators is proposed to meet the special requirements of micro vibration control. This design compactly arranges piezoelectric actuators, an inertial body, and a passive isolator to suppress multi-directional transmission of harmonic vibrations by controlling the vibrations of the inertial body. Firstly, a dynamic model of the coupling system including the load, the isolator, and the elastic foundation is established based on the generalized variational principle. Next, the vibration controllability of the proposed multi-directional active/passive isolator is analyzed based on the assumption of frequency domain optimal control. Finally, the actual performance of the active/passive isolator is obtained by experiments. The test results demonstrate that hybrid active-passive control significantly reduces vibration transmission compared to passive isolation alone. Within the frequency range of 0-300 Hz, the vibration levels of error points can be attenuated by at least 18dB with the multi-directional active/passive isolator. Additionally, the total vibration level of the monitoring point in all three directions is reduced by approximately 34 dB, while the amplitude of the strong tonal vibrations decreases by at least 15 dB.

Key words: micro-vibration, active/passive vibration isolation, six-DOF control, piezoelectric actuator

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