• CN:11-2187/TH
  • ISSN:0577-6686
微机电系统中微磨擦特性及控制研究
刘莹;温诗铸
STUDY ON PERFORMANCES OF MICRO-FRICTION AND ITS CONTROL IN MEMS
Liu Ying;Wen Shizhu
. 2002, (3): 1 -5 .