• CN:11-2187/TH
  • ISSN:0577-6686
超精密磁悬浮工作台及其解耦控制
李黎川;丁玉成;卢秉恒
HIGH-PRECISION MAGNETICALLY SUSPENDED TABLE AND ITS DECOUPLING CONTROL
Li Lichuan;Ding Yucheng;Lu Bingheng
. 2004, (9): 84 -88,9 .