混合进化算法的Metropolis蒙特卡罗MEMS单晶硅湿法刻蚀工艺模型

王树桥;幸研;田秘;仇晓黎;齐建昌

Hybrid Evolutionary–Metropolis Monte Carlo Algorithm for Wet Etching of Silicon MEMS Fabrication Process

WANG Shuqiao;XING Yan;TIAN Mi;QIU Xiaoli;QI Jianchang

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