基于纳米压痕和纳米冲击技术研究溅射功率对Ti薄膜力学性能的影响
靳巧玲, 王海斗, 李国禄, 张建军, 刘金娜
Effect of Sputtering Power on the Mechanical Properties of Ti Film Based on the Nano Indentation Method and Nano Impact Method
JIN Qiaoling, WANG Haidou, LI Guolu, ZHANG Jianjun, LIU Jinna
机械工程学报
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2018, (2): 117
-124
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DOI: 10.3901/JME.2018.02.117
