基于纳米压痕和纳米冲击技术研究溅射功率对Ti薄膜力学性能的影响

doi:10.3901/JME.2018.02.117

机械工程学报 ›› 2018, Vol. 54 ›› Issue (2): 117-124.doi: 10.3901/JME.2018.02.117

基于纳米压痕和纳米冲击技术研究溅射功率对Ti薄膜力学性能的影响

靳巧玲^1,2, 王海斗², 李国禄¹, 张建军¹, 刘金娜^2,3

1. 河北工业大学材料科学与工程学院天津 300130;
2. 装甲兵工程学院装备再制造技术国防科技重点实验室北京 100072;
3. 哈尔滨工程大学材料科学与化学工程学院哈尔滨 150001

收稿日期:2017-03-27 修回日期:2017-09-17 出版日期:2018-01-20 发布日期:2018-01-20
通讯作者: 王海斗(通信作者),男,1969年出生,博士,教授,博士研究生导师。主要研究方向为再制造产品寿命预测及摩擦学。E-mail:wanghaidou@aliyun.com
作者简介:靳巧玲,女,1992年出生。主要研究方向为薄膜材料及纳米压痕技术。E-mail:15222778206@163.com
基金资助:
国家自然科学基金重点（51535011）和国防973计划（61328304）资助项目。

Effect of Sputtering Power on the Mechanical Properties of Ti Film Based on the Nano Indentation Method and Nano Impact Method

JIN Qiaoling^1,2, WANG Haidou², LI Guolu¹, ZHANG Jianjun¹, LIU Jinna^2,3

1. School of Materials Science and Engineering, Hebei University of Technology, Tianjin 300130;
2. National Key Lab for Remanufacturing, Academy of Armored Forces Engineering, Beijing 100072;
3. College of Materials Science and Chemical Engineering, Harbin Engineering University, Harbin 150001

Received:2017-03-27 Revised:2017-09-17 Online:2018-01-20 Published:2018-01-20

摘要/Abstract

摘要： 控制磁控溅射工艺中的溅射功率为变量，在玻璃基体上沉积了相同厚度的纯Ti金属薄膜。采用原子力显微镜、X射线衍射仪、纳米压痕仪、纳米冲击系统、电子薄膜应力分布测试仪表征薄膜表面形貌、相结构和力学性能，研究溅射功率对薄膜显微结构和力学性能的影响机制。结果表明：随着溅射功率的增加，Ti膜晶粒尺寸和粗糙度与溅射功率呈指数函数增大，晶粒择优取向程度与薄膜硬度总体呈现上升的趋势；溅射功率较小时，薄膜延展性好，不易产生疲劳断裂；薄膜疲劳寿命受残余应力的影响程度高，残余应力最大的薄膜，疲劳寿命最短。分析原因认为溅射功率主要通过影响Ti原子团、Ar离子团的能量以及靶材原子的动能，进一步影响薄膜的显微结构和残余应力；薄膜硬度受晶粒择优取向程度影响较大；残余拉应力的增加会促进裂纹的形核和生长，降低薄膜的断裂韧度并缩短疲劳寿命；纳米冲击测试结果显示溅射功率变大，薄膜破坏形式由塑性变形转变为脆性断裂，即薄膜由韧性向脆性转变。

关键词: Ti薄膜, 残余应力, 溅射功率, 抗冲击疲劳, 压入塑性

Abstract: Ti metal film with the same thickness has been deposited on glass substrate by magnetron sputtering method with different sputtering power. In order to study the influence mechanism of sputtering power on the structure and mechanical properties, surface morphology, phase structure and mechanical properties of films is studied by using atomic force microscope, X-ray diffractometer, nanoindentation, nano-impact system and electronic film stress distribution tester. The results show that with the increasing of sputtering power, the grain size and roughness increases with the sputtering power exponentially. The intensity of preferred orientation and hardness is slight increasing with the increasing of sputtering power. A lower sputtering power tend to produce higher ductility and resistance to fatigue fracture. The results also show that fatigue fracture life affected by residual stress Seriously, and the film with the biggest residual stress has the the shortest fatigue life. By analyzing the result, we know that sputtering power influences the energy of Ti radical, Ar ion-cluster and target material atoms firstly and further affects the microstructure and residual stress of the film. The hardness is mainly depended by the degree of grain preferential orientation.The residual tensile stress increases will promote the nucleation and growth of cracks, reduce the fracture toughness of thin films and shorten the fatigue life; nano-impact testing results show that with the sputtering power increasing, the film breaking form by plastic deformation to brittle fracture, which transformed from ductile to brittle film.

Key words: impact fatigue fracture resistance, indentation plasticity, residual stress, sputtering power, Ti film

中图分类号:

TG133

靳巧玲, 王海斗, 李国禄, 张建军, 刘金娜. 基于纳米压痕和纳米冲击技术研究溅射功率对Ti薄膜力学性能的影响[J]. 机械工程学报, 2018, 54(2): 117-124.

JIN Qiaoling, WANG Haidou, LI Guolu, ZHANG Jianjun, LIU Jinna. Effect of Sputtering Power on the Mechanical Properties of Ti Film Based on the Nano Indentation Method and Nano Impact Method[J]. Journal of Mechanical Engineering, 2018, 54(2): 117-124.

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基于纳米压痕和纳米冲击技术研究溅射功率对Ti薄膜力学性能的影响

Effect of Sputtering Power on the Mechanical Properties of Ti Film Based on the Nano Indentation Method and Nano Impact Method

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