磁控溅射磁场及放电参数对氩离子输运的调控
田庆旭, 周啸, 龚鸣宇, 张鹤霖, 陈淑英, 孟范超
Magnetic and Discharge Parameter Effects on Argon Ion Transport in Magnetron Sputtering
Tian Qingxu, Zhou Xiao, Gong Mingyu, Zhang Helin, Chen Shuying, Meng Fanchao
机械工程学报
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2026, (14): 207
-219
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DOI: 10.3901/JME.260749
