纳米厚度光刻胶多次刮刀涂布工艺分析
李禹泽, 闫英, 何涛, 李涵, 李贺男, 万佳奇, 方子铿, 郭东明
Nanometer-scale Thickness Photoresist Multiple Blade Coating Process Analysis
LI Yuze, YAN Ying, HE Tao, LI Han, LI Henan, WAN Jiaqi, FANG Zikeng, GUO Dongming
机械工程学报
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2026, (13): 410
-417
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DOI: 10.3901/JME.260704
