单晶硅放电成形切割-电解组合加工建模分析与实验研究
辛彬, 冀佳木, 张隽铖
Modeling Analysis and Experimental Research on Discharge Forming Cutting-electrochemical Combined Machining of Single Crystalline Silicon
XIN Bin, JI Jiamu, ZHANG Juancheng
机械工程学报
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2026, (1): 436
-447
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DOI: 10.3901/JME.260032
