铌酸锂原子级抛光缺陷形貌演化机理研究
郭江, 杨哲, 徐海俊, 李琳光, 王东周, 张鹏飞
Study on the Evolution Mechanism of Defects Morphology in Atomic Scale Polishing of LiNbO3
GUO Jiang, YANG Zhe, XU Haijun, LI Linguang, WANG Dongzhou, ZHANG Pengfei
机械工程学报
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2025, (13): 474
-482
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DOI: 10.3901/JME.2025.13.474
