激光-微铣削复合加工氧化铝共烧基板基础研究
王子鸣, 侯清健, 许立讲, 王越飞, 肖何, 陈妮, 李亮
Fundamental Research on Laser-micro Milling Hybrid Processing of Alumina Co-fired Substrate
WANG Ziming, HOU Qingjian, XU Lijiang, WANG Yuefei, XIAO He, CHEN Ni, LI Liang
机械工程学报
.
2024, (21): 397
-406
.
DOI: 10.3901/JME.2024.21.397
