添加剂及热处理对钴互连镀层电性能的影响机理研究
陈淑慧, 张梦云, 谭祾月, 李明, 杭弢
Effects of Additives and Heat Treatment on the Electrical Properties of Cobalt Interconnect Plating
CHEN Shuhui, ZHANG Mengyun, TAN Lingyue, LI Ming, HANG Tao
机械工程学报
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2022, (2): 66
-75
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DOI: 10.3901/JME.2022.02.066
