基于磁控溅射制备金属纳米颗粒的低温键合技术研究
方君鹏, 王谦, 蔡坚, 万翰林, 宋昌明, 郑凯, 周亦康
Research on Low-temperature Bonding Technology Using Metal Nanoparticles Prepared by Magnetron Sputtering
FANG Junpeng, WANG Qian, CAI Jian, WAN Hanlin, SONG Changming, ZHENG Kai, ZHOU Yikang
机械工程学报
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2022, (2): 34
-42
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DOI: 10.3901/JME.2022.02.034
