三种两自由度柔顺精密定位平台的性能对比与分析
王念峰, 张志远, 张宪民, 梁晓合
Performance Comparison and Analysis of Three 2-DOF Compliant Precision Positioning Stages
WANG Nianfeng, ZHANG Zhiyuan, ZHANG Xianmin, LIANG Xiaohe
机械工程学报
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2018, (13): 102
-109
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DOI: 10.3901/JME.2018.13.102
