三种两自由度柔顺精密定位平台的性能对比与分析

doi:10.3901/JME.2018.13.102

机械工程学报 ›› 2018, Vol. 54 ›› Issue (13): 102-109.doi: 10.3901/JME.2018.13.102

• 特邀专栏：柔性机构及机器人 • 上一篇下一篇

三种两自由度柔顺精密定位平台的性能对比与分析

王念峰, 张志远, 张宪民, 梁晓合

华南理工大学机械与汽车工程学院广州 510640

收稿日期:2017-07-22 修回日期:2018-02-14 出版日期:2018-07-05 发布日期:2018-07-05
通讯作者: 王念峰(通信作者),男,1978年出生,博士,教授,博士研究生导师。主要研究方向为机器人,柔顺机构和结构优化。E-mail:menfwang@scut.edu.cn
作者简介:张志远,男,1992年出生,硕士研究生。主要研究方向为柔顺精密定位。E-mail:805541375@qq.com;张宪民,男,1964年出生,教授,博士研究生导师。主要研究方向为柔顺机构理论及精密装备技术等。E-mail:zhangxm@scut.edu.cn
基金资助:
国家自然科学基金（51575187）、广州市科技计划（2014Y2-00217）、广州黄埔区科技计划重大专项（20150000661）和华南理工大学中央高校基本科研业务费（2015ZZ007）资助项目。

Performance Comparison and Analysis of Three 2-DOF Compliant Precision Positioning Stages

WANG Nianfeng, ZHANG Zhiyuan, ZHANG Xianmin, LIANG Xiaohe

School of Mechanical & Automotive Engineering, South China University of Technology, Guangzhou 510640

Received:2017-07-22 Revised:2018-02-14 Online:2018-07-05 Published:2018-07-05

摘要/Abstract

摘要： 针对传统的缺口型和直片型柔性铰链平台行程不足的特点，设计了一种波纹簧片型柔性铰链，并在此基础上设计了由电磁驱动的两自由度柔顺精密定位平台。基于波纹簧片型、缺口型和直片型柔性铰链平台的特点建立有限元模型分析了这三种平台的静态和模态性能，包括行程，固有频率等。利用电磁驱动作为定位平台的输入驱动，综合对比了三种平台的实际行程，耦合位移，重复定位精度等性能，验证了有限元分析的正确性。结果表明，相比于缺口型和直片型柔性铰链平台，基于波纹簧片型柔性铰链的两自由度柔顺精密定位平台具有行程大，定位精度高的特点，对于柔顺精密定位平台的研究具有重要的参考价值。

关键词: 波纹簧片, 电磁驱动, 有限元分析

Abstract: For traditional compliant joints, such as notch joints and leaf springs, the deformations are quite limited. To overcome those shortcomings, periodically corrugated flexible (CF) beam is applied to design compliant joints on 2-DOF precise positioning stage which is driven by electromagnetic actuators. Based on the features of these three positioning stages, the models of finite element analysis are established, and the static and modal characteristics are analyzed by using finite element analysis (FEA), including stroke, natural frequency and so on. These three compliant stages are driven by electromagnetic drive, and the actual stroke, coupled displacement, and repeat positioning accuracy are considered to test and verify the correctness of FEA. The experimental results show that, compared to traditional compliant joints, notch joints and leaf springs, the novel 2-DOF micro-positioning stage based on periodically CF units has large stroke and high positioning accuracy. That's a quit important reference value for the research of compliant precision positioning stage.

Key words: corrugated flexible units, electromagnetic drive, finite element analysis

中图分类号:

TB121
TH122

王念峰, 张志远, 张宪民, 梁晓合. 三种两自由度柔顺精密定位平台的性能对比与分析[J]. 机械工程学报, 2018, 54(13): 102-109.

WANG Nianfeng, ZHANG Zhiyuan, ZHANG Xianmin, LIANG Xiaohe. Performance Comparison and Analysis of Three 2-DOF Compliant Precision Positioning Stages[J]. Journal of Mechanical Engineering, 2018, 54(13): 102-109.

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三种两自由度柔顺精密定位平台的性能对比与分析

Performance Comparison and Analysis of Three 2-DOF Compliant Precision Positioning Stages

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