离子束增强沉积Si3N4膜的显微组织结构分析

金祖卿;常明;许守廉;柳襄怀;郑志宏

ANALYSES OF THE MICROSTRUCTURES OF Si3N4 FILM BY ION BEAM ENHANCED DEPOSITION

Jin Zuqing;Chang Ming;Xu Shoulian;Liu Xianghuai;Zheng Shihong

. 1991, (1): 72 -76 .