等离子浸没离子注入合成TiN/Ti-O梯度薄膜的成分与力学性能

文峰;黄楠;孙鸿;万国江

COMPOSITION AND MECHANICAL PROPERTIES OF TiN/Ti-O GRADIENT FILMS PREPARED BY PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION

Wen Feng;Huang Nan;Sun Hong;Wan Guojiang

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