关键词: 尺蠖运动, 纳米定位, 纳米驱动, 压电电动机

Abstract: A kind of piezoelectric motor with long-range and nano-step is introduced. The principle of inchworm motion is based on and improved in the PZT motor. In structure design, the traditional single actuator is updated to double actuators. With the novel principle of push-pull relay movement and proper four-channel driving signals, the PZT motor can move continuously and smoothly. The performances of the motor are tested through experiments. The experiment results show that the motion of the piezoelectric motor is linear, the moving speed can reach 12 mm/s at the voltage of 300 V and the minimal step is less than 6 nm, the moving range is more than 10 mm.

Key words: Inchworm motion, Nano-driving, Nano-positioning, Piezoelectric motor