关键词: Preston方程, 进动运动, 气囊抛光, 去除函数

Abstract: In order to improve the surface accuracy and processing efficiency of optical elements, theoretical and experimental research on removing characteristics of ultra-precision bonnet polishing method is made. Kinematic principles are applied to deducing the material removing function of bonnet polishing precession motion based on Preston equation after the principle of bonnet polishing is analyzed. The removing function being approximate Gauss distribution is obtained by means of computer simulation. Simulation analysis of the effect on removal characteristics of polishing movement in terms of several main parameters is made and three conclusions on bonnet tool polishing technology are obtained. Two kinds of removing functions coincide well in terms of contrast experiments made on an ultra-precision bonnet intelligent polishing machine, and an ultra-precision smooth surface with 0.012 6 μm surface precision is achieved. It provides a theoretical foundation for the research on bonnet polishing technology.

Key words: Bonnet tool polishing, Precession process, Preston function, Removal function