关键词: 承载能力, 滑移流机制, 偏位角, 微型气浮轴承, 修正的雷诺方程

Abstract: Judging with Knudsen number, the flow regime in the micro gas bearing is slip regime instead of the continuum regime. The second-order slip model is adopted and the modified Reynold’s equation for the gas flow is gotten. Solving the Reynold’s equations with the finite difference method (FDM), the gas pressure distributions of continuum flow regime and slip regime are obtained. Consequently, the dimensionless load carrying capacities and attitude angles are acquired. Comparing the solutions between two regimes, it shows that there are distinct discrepancies between the steady performances of the two regimes. At the same rotating speed and eccentricity ratio, the slip effect reduce the gas pressure curvature and hence the load carrying capacity.

Key words: Attitude angle, Micro gas bearing, Slip regime Modified Reynold’s equation Load carrying capacity