• CN：11-2187/TH
  • ISSN：0577-6686
机械工程学报

›› 1994, Vol. 30 ›› Issue (5): 16-21.

• 论文 • 上一篇    下一篇

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基于全部弹性变形原理的超精密微动工作台的实验研究

融亦鸣;朱耀祥;罗振璧;章启成   

  1. 美国南伊利诺伊大学;北京机械工业学院;清华大学;北京玩具研究所
  • 发布日期:1994-09-01

AN EXPERIMENTAL INVESTIGATION ON TOTALLY ELASTIC-DEFORMATION BASED MICRO-POSITION STAGE WITH ULTRA-PRECISION

Rong Yiming;Zhu Yaoxiang;Luo Zhengbi;Zhang Qichang   

  1. Southern Illinois University, U. S. A Beijing Institute of Machinery Industry Qinghua University Beijing Institute of Toy Research
  • Published:1994-09-01

摘要： 提出了一种无摩擦工作台。采用弹性导轨和弹性传动机构，所以不受间隙和摩擦的影响，可以达到较高的分辨率，同时微动台中也不需要任何精密制造的零件。试验证明，此微动台具有精致微米的定位精度，分辨率可达0.01μm。探讨了微动台的结构和性能。

关键词: xy工作台, 微位移工作台, 微细加工, 亚微米复印

Abstract: The friction free x-y stage proposed is supported by an elastic guide way and driven by an elastic transmitting mechanism, so that the effect of mechanical friction and backlash are eliminated and higher resolution is obtained. There is no any special high Precision manufacture required for any components. The experiment test have proven that micro-position stage has a submicron position accuracy and 0.01μm motion resolution. The construction and performances of the stage also presented.

Key words: Microfabrication, Micro-positioning stage, Submicron lithography, xy stage

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