关键词: 3-RPC, 柔性精密平台, 位置分析, 误差分析

Abstract: Based on 3-RPC parallel mechanism, a novel model of flexible precision platform is proposed, which is driven by piezoelectric ceramic actuator. And moving pair, cylinder, connecting rod motion pair of structure are optimized based on the initial configuration. Then using the FEA simulations, static analysis of the same size of the initial configuration and the optimization is analysed. Using Homogeneous transformation method, the forward and inverse kinematics of 3-RPC is gained. Obtained the relationship of flexible precision platform driving by piezoelectric ceramic actuator between the input of move pair and the micro displacement output of the upper platform, and loading test by finite element software, testing the solution results of the forward and inverse kinematics. Based on design principle, the error of principle of the precision platform is analyzed and calculated the displacement error on function and non-function direction, while comparing the output displacement and the size of the error. And the correctness of the analysis results is validated by FEA simulations. The results of the study show that the flexible precision platform has several advantages in the aspects of kinematics decouple, structure simple, control easily and a good application prospect.

Key words: 3-RPC, Displacement analysis, Error analysis, Flexible precision platform