曲面共形微米电路机械臂气溶胶喷射打印与原位激光烧结研究

doi:10.3901/JME.260086

摘要/Abstract

摘要： 曲面共形电路凭借其可直接贴合目标曲面基底，实现电子器件空间排列的多功能化与高集成化的独特优势，在可穿戴电子、生物医疗、航空航天等多个领域展现出重要的潜在价值。为系统解决复杂曲面共形电路制造中存在的灵活性差、打印精度低以及后处理限制等问题，提出了一种基于六轴机械臂的曲面共形微米电路多自由度气溶胶喷射打印与原位激光烧结一体化制造方法。六轴机械臂集成了气溶胶喷射打印与红外激光烧结模块，通过构建多线程控制架构实现了灵活的路径规划与打印物理量同步控制。为实现对气溶胶喷射打印曲面共形微米电路的功能化，提出了一种多自由度的曲面共形原位激光烧结方法，得到了优化的激光烧结工艺参数，实现了25～100 m^-1 大曲率变化以及400 mm×190 mm大幅面范围曲面共形电路的高精度打印和高导电性烧结，电路最小线宽优于50 μm，电阻率低至6.53×10^-8 Ω·m。进一步的，验证了该组合工艺流程适用于热变形温度在60～360 ℃的不同聚合物曲面基底，成功实现了空间双螺旋模型表面-20°至+30°大倾角范围共形传导电路以及曲面叶片模型表面8通道共形温度传感电路的直接制造。本研究突破了复杂曲面共形微米电路在制造灵活性与功能化方面的关键技术瓶颈，为曲面共形电子系统的快速制造提供了一种高效、可靠的解决方案。

关键词: 曲面共形电路, 气溶胶喷射打印, 激光烧结, 机械臂打印, 微米电路

Abstract: Conformal electronics on curved surfaces offer unique advantages in achieving multifunctionality and high integration of electronic devices by directly adhering to target substrates, demonstrating significant potential value in fields such as wearable electronics, biomedical devices, and aerospace engineering. To systematically address the challenges of poor printing flexibility, low printing accuracy, and post-processing limitations in the fabrication of conformal microscale circuits on complex curved surfaces, this study proposes an integrated manufacturing method combining multi-degree-of-freedom aerosol jet printing and in-situ laser sintering based on a six-axis robotic arm. The robotic arm is equipped with an aerosol jet printing module and an infrared laser sintering unit, and a multi-threaded control architecture is developed to enable flexible path planning and synchronous control of printing parameters. To achieve uniform sintering of aerosol jet printed conformal microscale circuits on curved surfaces, a multi-degree-of-freedom conformal in-situ laser sintering methodology is proposed, yielding optimized laser sintering process parameters. This enables high-precision printing and high-conductivity sintering of conformal circuits on surfaces with curvature variations of 25~100 m^-1 and a large area of 400 mm×190 mm. The circuit line width is less than 50 μm, and the electrical resistivity is as low as 6.53×10^-8 Ω·m. Furthermore, the proposed integrated process is validated to be compatible with polymer substrates with heat deflection temperatures ranging from 60 ℃ to 360 ℃. The study has successfully achieved direct manufacturing of conformal conductive circuits on a spatial double-helix surface across a wide inclination angle range of -20° to +30°, and also realized 8-channel conformal thermal sensor circuits on a curved blade model surface. This study overcomes key technical bottlenecks in the flexibility and functionality of conformal microcircuit manufacturing on complex curved surfaces, providing an efficient and reliable solution for the rapid fabrication of conformal electronic systems.

Key words: conformal circuits, aerosol jet printing, laser sintering, robotic printing, microscale circuits

中图分类号:

TH164

丁毅, 徐辰雨, 贺健康, 岳峻宇, 鱼琨, 李家欣, 霍子瑶, 李涤尘. 曲面共形微米电路机械臂气溶胶喷射打印与原位激光烧结研究[J]. 机械工程学报, 2026, 62(3): 282-297.

DING Yi, XU Chenyu, HE Jiankang, YUE Junyu, YU Kun, LI Jiaxin, HUO Ziyao, LI Dichen. Robotic Aerosol Jet Printing of Conformal Microscale Circuits with In-situ Laser Sintering[J]. Journal of Mechanical Engineering, 2026, 62(3): 282-297.

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