机理驱动的闭式静压导轨运动误差建模方法

doi:10.3901/JME.2025.11.301

摘要/Abstract

摘要： 闭式静压导轨以运动精度高、支承刚度大的优势在超精密数控机床中得到了较多应用。闭式静压导轨运动误差是其性能评价的重要指标之一，针对其装配体导轨面几何误差难以准确测量造成运动误差定量分析困难、精度设计结果偏离的难题，提出一种基于机理驱动的建模方法，以误差均化效应建立垂直运动误差分析模型，以导轨面高精度测量和拟合数据验证模型。首先提出考虑导轨面轮廓误差的单油垫油膜厚度计算方法，实现了油垫实际油膜承载力的求解，建立闭式静压导轨平衡方程，量化分析运动滑块的线性偏差；采集闭式静压导轨装配体导轨面几何误差数据，采用傅里叶级数拟合导轨面轮廓误差，基于最小二乘法辨识导轨面直线度误差参数；利用拟合得到的导轨面几何误差数据，优化和验证运动误差建模方法。实验表明，提出的运动误差量化方法具有较好的准确性，在0至220 mm行程范围内的垂直方向运动误差预测值和测量值一致性较高。压板端部位置处螺钉采用非均匀预紧，可有效改善滑块垂直方向线性偏差。该模型可预测出不同物理参数条件下的闭式静压导轨垂直方向运动误差，研究结果为进一步量化分析闭式静压导轨运动误差和其精度设计提供参考。

关键词: 机理驱动模型, 闭式静压导轨, 运动误差, 几何误差测量

Abstract: The closed hydrostatic guideway has been widely used in ultra-precision CNC machine tools due to its advantages of high motion precision and large support rigidity. The motion error is one of the key indicators for its performance evaluation. Aiming at the quantitative analysis of motion error and deviation of accuracy design results caused by the difficulties of accurate measurement of the guide rail surface geometric error of the assembly, a mechanism-driven proposal is proposed. The vertical motion error analysis model is established by the error averaging effect, and the model is verified by the high-precision measurement and fitting data of the guide rail surface. Firstly, a calculation method of oil film thickness of a single oil pad considering the contour error of the guide rail surface is proposed, which realizes the solution of the actual oil film bearing capacity of the oil pad, establishes the balance equation and quantitatively analyzes the linear error of the moving slider. The geometric error data of the guide rail surface of the closed hydrostatic guideway assembly are collected, and the Fourier series is used to fit the contour error of the guide rail surface, and the straightness error parameters of the guide rail surface are identified based on the least squares method. Based on the geometric error data of the guide rail surface obtained by fitting, the motion error modeling method is optimized and verified. Experiments show that the proposed motion error quantification method has good accuracy. There is a high degree of consistency between the prediction accuracy and the actual measured value of the vertical motion error in the stroke from 0 to 220 mm. The screw at the end position of the keeper rail is preloaded non-uniformly, which can effectively improve the vertical linear deviation of the slider. The model can predict the vertical motion error of the closed hydrostatic guideway under different physical parameters. The research results provide a reference for further quantitative analysis of the closed hydrostatic guideway motion error and its accuracy design.

Key words: mechanism drive model, closed hydrostatic guideway, motion error, geometric error measurement

中图分类号:

TH133

查俊, 陈勃昊. 机理驱动的闭式静压导轨运动误差建模方法[J]. 机械工程学报, 2025, 61(11): 301-310.

ZHA Jun, CHEN Bohao. Mechanism-driven Motion Error Modeling for Closed Hydrostatic Guideways[J]. Journal of Mechanical Engineering, 2025, 61(11): 301-310.

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