基于超精密磨削耦合效应的空气静压主轴设计分析方法与试验验证

doi:10.3901/JME.2025.05.040

机械工程学报 ›› 2025, Vol. 61 ›› Issue (5): 40-49.doi: 10.3901/JME.2025.05.040

• 特邀专栏：高性能静压轴承 • 上一篇

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基于超精密磨削耦合效应的空气静压主轴设计分析方法与试验验证

岳松洁¹, 程凯^1,2, 白清顺¹, 丁辉³, 赵亮¹, 高思煜¹

1. 哈尔滨工业大学机电工程学院哈尔滨 150001;
2. 布鲁内尔大学欧克斯桥UB8 3PH 英国;
3. 江苏集萃精凯高端装备技术有限公司昆山 215300

收稿日期:2024-04-01 修回日期:2024-10-03 发布日期:2025-04-15
作者简介:岳松洁，女，1998年出生，博士研究生。主要研究方向为超精密内圆磨床的设计与制造，空气静压主轴技术。E-mail：yuesj@stu.hit.edu.cn;程凯，男，1961年出生，博士，教授，博士研究生导师。主要研究方向为超精密加工，空气静压主轴系统设计分析。E-mail：kai.cheng@brunel.ac.uk;白清顺(通信作者)，男，1974年出生，博士，教授，博士研究生导师。主要研究方向为超精密加工与微纳制造，精密机械设计与制造，超洁净制造理论与技术。E-mail：qshbai@hit.edu.cn
基金资助:
国家重点研发计划(2022YFB3402705)和黑龙江省重点研发计划(2022ZX03A05)资助项目。

Analytical Method and Experimental Verification of Aerostatic Spindle Design Based on the Coupling Effect of Ultra-precision Grinding

YUE Songjie¹, CHENG Kai^1,2, BAI Qingshun¹, DING Hui³, ZHAO Liang¹, GAO Siyu¹

1. School of Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin 150001;
2. Brunel University London, Uxbridge UB8 3PH, UK;
3. Jiangsu Jitri Jingkai High-end Equipment Technology Co., Ltd., Kunshan 215300

Received:2024-04-01 Revised:2024-10-03 Published:2025-04-15

摘要/Abstract

摘要： 超精密内圆磨床工件轴采用空气静压支承，其在超精密内圆磨削过程中与砂轮轴间的耦合效应往往会改变空气静压主轴的回转精度并引入新的误差，对加工过程和工件精度有重要影响。提出了一种新的建模方法来研究空气静压主轴回转的耦合效应及对超精密磨削过程的影响。将工件轴-砂轮轴组成的磨削系统作为一个整体加工闭环系统来进行设计分析。为了科学地解析这一过程，以开发的超精密内圆磨床为研究对象，建立空气静压主轴双转子耦合模型，评估了空气静压轴承参数和超精密内圆磨削过程对主轴动态响应的影响。并进一步分析耦合效应在亚微米-纳米尺度下对加工表面形貌的影响。研究发现，空气静压轴承参数和动态磨削力对主轴振动有很大的影响，会降低表面加工质量，而最终的加工表面形貌由磨削系统和磨削过程的耦合共同影响决定。研究最后展示了加工试验验证，用频谱分析方法得到了加工表面的圆度误差，试验与分析结果一致，进一步验证了该方法的精密工程可靠性和应用性，该研究对于设计分析高精度空气静压主轴与科学的理解超精密内圆磨削系统中空气静压主轴耦合效应具有重要意义。

关键词: 空气静压主轴, 耦合效应, 超精密内圆磨削, 成圆精度, 跨尺度分析与设计

Abstract: The utilization of aerostatic spindles in various applications is accompanied by the presence of coupling effects at the spindles and the machining system during the machining process. These coupling effects inherently result in a decrease in the spindle rotational motion accuracy, subsequently introducing additional errors significantly influencing both the machining process and the precision of the workpiece. The phenomenon of coupling in ultra-precision internal grinding might result in alterations to the rotary precision of the aerostatic spindle. This research presents a novel modeling approach for investigating the coupling effects of the aerostatic spindle rotary and its impact on the grinding process. The comprehensive analysis of the grinding system, which includes the workpiece spindle and the grinding wheel spindle, is conducted. The research investigates the utilization of the developed ultra-precision internal grinding machine to provide a comprehensive explanation of the process. To assess the impact of the aerostatic bearing parameters and the grinding process on the dynamic response of the spindle, a double-rotor coupling model is established. Furthermore, an analysis is conducted to examine the impact of the coupling effect on the surface topography at the submicron scale. The influence of bearing settings and dynamic grinding force on spindle vibration, which can lead to a degradation in machining quality, has been observed. Additionally, the final surface topography is defined through the coupling effects of the grinding system and the grinding process. The study concluded with the execution of machining experiments, wherein the roundness error of the machined surface was determined using spectral analysis. The obtained results from both the experimental and analytical approaches exhibited consistency, thereby confirming the reliability of the employed method. This research holds substantial importance in the realm of high-precision aerostatic spindles design and provides valuable insights into the coupling effects between the workpiece spindles and wheel spindles within the grinding system.

Key words: aerostatic spindle, the coupling effect, ultra-precision internal grinding, rounding accuracy, multiscale modelling and design analysis

中图分类号:

TG502

岳松洁, 程凯, 白清顺, 丁辉, 赵亮, 高思煜. 基于超精密磨削耦合效应的空气静压主轴设计分析方法与试验验证[J]. 机械工程学报, 2025, 61(5): 40-49.

YUE Songjie, CHENG Kai, BAI Qingshun, DING Hui, ZHAO Liang, GAO Siyu. Analytical Method and Experimental Verification of Aerostatic Spindle Design Based on the Coupling Effect of Ultra-precision Grinding[J]. Journal of Mechanical Engineering, 2025, 61(5): 40-49.

参考文献

[1] LU Lihua，GAO Qiang，CHEN Wanqun，et al. Investigation on the fluid–structure interaction effect of an aerostatic spindle and the influence of structural dimensions on its performance[J]. Proceedings of the Institution of Mechanical Engineers，Part J：Journal of Engineering Tribology，2017，231(11)：1434-1440.
[2] SHI Jianghai，CAO Hongrui，MAROJU N K，et al. Dynamic modeling of aerostatic spindle with shaft tilt deformation[J]. Journal of Manufacturing Science and Engineering，2020，142(2)：021006.
[3] 雷群，袁雅阁，杜建军，等. 飞刀铣削中高速气浮电主轴转子动态特性研究[J]. 机械工程学报，2021，57(13)：45-54. LEl Qun，YUAN Yage，DU Jianjun，et al. Study on rotor dynamics characteristics of high speed aerostatic motorized spindle during fly-cutter milling process[J]. Journal of Mechanical Engineering，2021，57(13)：45-54.
[4] CHEN Yong，CHEN Xun，XU Xipeng，et al. Quantitative impacts of regenerative vibration and abrasive wheel eccentricity on surface grinding dynamic performance[J]. The International Journal of Advanced Manufacturing Technology，2018，96(5-8)：2271-2283.
[5] LU Xiaohong，JIA Zhenyuan，LIU Shengqian，et al. Chatter stability of micro-milling by considering the centrifugal force and gyroscopic effect of the spindle[J]. Journal of Manufacturing Science and Engineering，2019，141(11)：111003.
[6] SONG Laiyun，CHENG Kai，DING Hui，et al. The static performance of the high-speed aerostatic spindles with modified discharge coefficients[J]. Proceedings of the Institution of Mechanical Engineers，Part B：Journal of Engineering Manufacture，2020：1-13.
[7] CHEN Wanqun，LIANG Yingchun，SUN Yazhou，et al. A novel dynamic modeling method for aerostatic spindle based on pressure distribution[J]. Journal of Vibration and Control，2015，21(16)：3339-3347.
[8] 熊万里，原帅，胡灿，等. 液体静压主轴的回转精度规律及其极限预测[J]. 机械工程学报，2021，57(13)：70-82. XIONG Wanli，YUAN Shuai，HU Can，et al. The laws and ultimate prediction of rotation accuracy for hydrostatic spindle[J]. Journal of Mechanical Engineering，2021，57(13)：70-82.
[9] GAO Siyu，CHENG Kai. Multiphysics-based design and analysis of the high-speed aerostatic spindle with application to micro-milling[J]. Proceedings of the IMechE，Part J：Journal of Engineering Tribology，2016，230(7)：852-871.
[10] SUN X，CHENG K. Multiscale simulation of the nanometric cutting process[J]. International Journal of Advanced Manufacturing Technology，2010，47：891-901.
[11] CAO Yanlong，GUAN Jiayan，LI Bo，et al. Modeling and simulation of grinding surface topography considering wheel vibration[J]. The International Journal of Advanced Manufacturing Technology，2013，66(5-8)：937-945.
[12] WANG Xuezhi，YU Tianbiao，DAI Yuanxing，et al. Kinematics modeling and simulating of grinding surface topography considering machining parameters and vibration characteristics[J]. The International Journal of Advanced Manufacturing Technology，2016，87(9-12)：2459-2470.
[13] GUO Miaoxian，LI Beizhi，DING Zishan，et al. Empirical modeling of dynamic grinding force based on process analysis[J]. The International Journal of Advanced Manufacturing Technology，2016，86(9-12)：3395-3405.
[14] LEONESIO M，PARENTI P，CASSINARI A，et al. A time-domain surface grinding model for dynamic simulation[J]. Procedia CIRP，2012，4：166-171.
[15] CAPPA S，REYNAERTS D，Al-Bender F. Reducing the radial error motion of an aerostatic journal bearing to a nanometre level：Theoretical modelling[J]. Tribology Letters，2014，53(1)：27-41.
[16] SHIMADA K，WAKABAYASHI D，SHIMOYAKAWA Y，et al. Numerical study on the rotational and machining accuracy of an end-milling process with spindles supported by aerostatic bearings[J]. Proceedings of the Institution of Mechanical Engineers，Part C：Journal of Mechanical Engineering Science，2022，236(20)：10541-10553.
[17] FANG Chenggang，HUO Dehong，HUANG Xiaodiao. A comprehensive analysis of factors affecting the accuracy of the precision hydrostatic spindle with mid-thrust bearing layout[J]. The International Journal of Advanced Manufacturing Technology，2021，114(3-4)：949-967.
[18] LIANG Yingchun，CHEN Wanqun，SUN Yazhou，et al. An expert system for hydro/aero-static spindle design used in ultra precision machine tool[J]. Robotics and Computer-Integrated Manufacturing，2014，30(2)：107-113.
[19] CHEN Wanqun，LU Lihua，LIANG Yingchun，et al. Flatness improving method of KDP crystal in ICF system and its implementation in machine tool design[J]. Proceedings of the Institution of Mechanical Engineers，Part E：Journal of Process Mechanical Engineering，2015，229(4)：327-332.
[20] LI Jiasheng，HUANG Ming，LIU Pinkuan. Analysis and experimental verification of dynamic characteristics of air spindle considering varying stiffness and damping of radial bearings[J]. The International Journal of Advanced Manufacturing Technology，2019，104(5-8)：2939-2950.
[21] CHEN Dongju，LI Shupei，ZHANG Xuan，et al. Relationship between dynamic characteristics of air film of aerostatic spindle and mid-frequency of surface topography[J]. Advances in Manufacturing，2022，10(3)：428-442.
[22] LIANG Yingchun，CHEN Wanqun，AN Chenhui，et al. Investigation of the tool-tip vibration and its influence upon surface generation in flycutting[J]. Proceedings of the Institution of Mechanical Engineers，Part C：Journal of Mechanical Engineering Science，2014，228(12)：2162-2167.
[23] AN C H，ZHANG Y，XU Q，et al. Modeling of dynamic characteristic of the aerostatic bearing spindle in an ultra-precision fly cutting machine[J]. International Journal of Machine Tools and Manufacture，2010，50(4)：374-385.
[24] CHEN Guoda，SUN Yazhou，AN Chenhui，et al. Measurement and analysis for frequency domain error of ultra-precision spindle in a flycutting machine tool[J]. Proceedings of the Institution of Mechanical Engineers，Part B：Journal of Engineering Manufacture，2018，232(9)：1501-1507.
[25] WU Quanhui，SUN Yazhou，CHEN Wanqun，et al. Theoretical and experimental investigation of spindle axial drift and its effect on surface topography in ultra-precision diamond turning[J]. International Journal of Machine Tools and Manufacture，2017，116：107-113.
[26] ZHANG Shaojian，YU Jinjie，TO S，et al. A theoretical and experimental study of spindle imbalance induced forced vibration and its effect on surface generation in diamond turning[J]. International Journal of Machine Tools and Manufacture，2018，133：61-71.
[27] CHEN Guoda，SUN Yazhou，ZHANG Feihu，et al. Influence of ultra-precision flycutting spindle error on surface frequency domain error formation[J]. The International Journal of Advanced Manufacturing Technology，2017，88(9-12)：3233-3241.
[28] SUN Yazhou，WU Quanhui，CHEN Wanqun，et al. Influence of unbalanced electromagnetic force and air supply pressure fluctuation in air bearing spindles on machining surface topography[J]. International Journal of Precision Engineering and Manufacturing，2021，22(1)：1-12.
[29] MA Yinchen，YANG Jianguo，LI Beizhi，et al. An analytical model of grinding force based on time-varying dynamic behavior[J]. The International Journal of Advanced Manufacturing Technology，2017，89(9-12)：2883-2891.
[30] CHEN Changshun，TANG Jinyuan，CHEN Haifeng，et al. Research about modeling of grinding workpiece surface topography based on real topography of grinding wheel[J]. The International Journal of Advanced Manufacturing Technology，2017，93(5-8)：2411-2421.
[31] VORONOV S A，VEIDUN M. Mathematical modeling of the cylindrical grinding process[J]. Journal of Machinery Manufacture and Reliability，2017，46(4)：394-403.
[32] CHEN Xun，BRIAN R W. Analysis and simulation of the grinding process. Part II：Mechanics of grinding[J]. International Journal of Machine Tools and Manufacture，1996，36(8)：883-896.

基于超精密磨削耦合效应的空气静压主轴设计分析方法与试验验证

Analytical Method and Experimental Verification of Aerostatic Spindle Design Based on the Coupling Effect of Ultra-precision Grinding

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