[1] ROTTWINKEL B. 发展中的半导体封装技术[J]. 中国集成电路,2019,28(12):41-42,47. ROTTWINKEL B. Developing semiconductor packaging technology[J]. China Integrated Circuit,2019,28(12):41-42,47 [2] IWASAKI M,SEKI K,MAEDA Y. High-precision motion control techniques:A promising approach to improving motion performance[J]. IEEE Ind. Electron. Mag,2012,6(1):32-40. [3] SINGHOSE W. Command shaping for flexible systems:A review of the first 50 years[J]. Int. J. Precis. Eng. Manuf,2009,10(4):153-168. [4] 杨明,曹佳,徐殿国. 基于输入整形技术的交流伺服系统抖动抑制[J]. 电工技术学报,2018,33(21):4979-4986. YANG Ming,CAO Jia,XU Dianguo. Jitter suppression of AC servo system based on input shaping technology[J] Journal of Electrotechnics,2018,33(21):4979-4986 [5] HA C,REW K,KIM K. Formulating a laplace domain approach for tuning motion profiles[C]//2011 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM),Budapest,2011:356-360. [6] HA C,REW K,KIM K. Robust zero placement for motion control of lightly damped systems[J]. IEEE Trans. Ind. Electron,2013,60(9):3857-3864. [7] HA C,LEE D. Analysis of embedded prefilters in motion profiles[J]. IEEE Trans. Ind. Electron,2016,65(2):1481-1489. [8] BIAGIOTTI L,MELCHIORRI C. FIR filters for online trajectory planning with time- and frequency-domain specifications[J]. Control Eng. Pract,2012,20(12):1385-1399. [9] BIAGIOTTI L,MELCHIORRI C,MORIELLO L. Optimal trajectories for vibration reduction based on exponential filters[J]. IEEE Trans. Control Syst. Technol.,2016,24(2):19. [10] BIAGIOTTI L,MELCHIORRI C,MORIELLO L. Damped harmonic smoother for trajectory planning and vibration suppression[J]. IEEE Trans. Control Syst. Technol.,2020,28(2):626-634. [11] OLABI A,BÉARÉE R,GIBARU O,et al. Feedrate planning for machining with industrial six-axis robots[J]. Control Eng. Pract.,2010,18(5):471-482. [12] BÉARÉE R. New Damped-Jerk trajectory for vibration reduction[J]. Control Eng. Pract.,2014,28:112-120. [13] BIAGIOTTI L,MELCHIORRI C. Trajectory planning for automatic machines and robots[M]. Berlin Heidelberg:Springer,2008. [14] FRANKLIN G,POWELL J D,EMAMI-NAEINI A. Feedback control of dynamic systems[M]. Upper Saddle Rive:Prentice Hall,2010. [15] JIANG Chao,HAN Xu,LIU Jie,et al. Correlation analysis of non-probabilistic convex model and corresponding structural reliability technique[J]. Comput. Methods Appl. Mech. Eng.,2011,200(33-36):2528-2546. [16] JIANG Chao,NI Bingyu,HAN Xu,et al. Non-probabilistic convex model process:A new method of time-variant uncertainty analysis and its application to structural dynamic reliability problems[J]. Comput. Methods Appl. Mech. Eng.,2013(268):656-676. [17] JIANG Chao,LI Jinwu,NI Bingyu,et al. Some significant improvements for interval process model and non-random vibration analysis method[J]. Comput. Methods Appl. Mech. Eng.,2019,357(1):112565. [18] DAI Luyao,LI Xin,ZHU Yu,et al. The generation mechanism of tracking error during acceleration or deceleration phase in ultraprecision motion systems[J]. IEEE Trans. Ind. Electron.,2019,66(9):7109-7119. [19] DAI Luyao,LI Xin,ZHU Yu,et al. Auto-tuning of model-based feedforward controller by feedback control signal in ultraprecision motion systems[J]. Mech. Syst. Signal Process.,2020,145:106764. [20] PREUMOT A. Vibration control of active structures[M]. London:Springer,2011. [21] LALANNE C,Sinusoidal vibration[M]. New York:John Wiley & Sons,Ltd.,2014. [22] LALANNE C,Mechanical shock[M]. New York:John Wiley & Sons,Ltd.,2014. [23] KOZAK K,SINGHOSE W,EBERT-UPHOFF I. Performance measures for input shaping and command generation[J]. J. Dyn. Syst. Meas. Control,2006,128:731-736. [24] KOZAK K,HUEY J,SINGHOSE W. Performance measures for input shaping[C]//Proceedings of 2003 IEEE Conference on Control Applications,2003:1227-1232. [25] SINGHOSE W,PAO L,A comparison of input shaping and time-optimal flexible-body control[J]. Control Eng. Pract.,1997,5(4):459-467. [26] DORF R C. Modern control system[M]. Upper Saddle Rive:Prentice Hall,2016. [27] JIANG Chao,NI Bingyu,LIU Ningyu. Interval process model and non-random vibration analysis[J]. J. Sound Vib.,2016,373:104-113. [28] JIANG Chao,HAN Xu,LI D. A new interval comparison relation and application in interval number programming for uncertain problems[J]. Computers Materials and Continua,2012,27(3):275-303. [29] NI Bingyu,JIANG Chao,LI Jinwu,et al. Interval K-L expansion of interval process model for dynamic uncertainty analysis[J]. J. Sound Vib.,2020,474:115254. |