合成射流传热特性及其在MEMS散热应用研究

doi:10.3901/JME.2023.24.164

摘要/Abstract

摘要： 尽管现有常用冷却技术可为微电子机械系统(Micro electro mechanical systems, MEMS)的散热提供解决方案，但实现电子设备的高效散热仍然是一个严峻挑战。与传统冷却技术相比，合成射流(Synthetic jet, SJ)是一种更加有效的散热技术，它为MEMS的散热提供了潜在解决途径。首先概述SJ的形成、发展及演变，在解释流场拓扑结构基础上对SJ传热特性进行研究，发现在驻点位置处SJ可获得最佳传热性能。然后深入分析影响SJ传热的腔体几何参数、激励器参数及流场参数，指出孔板间距是影响SJ冷却的关键因素。最后探讨基于SJ的微通道、翅片等多种新型散热器的散热性能，剖析实现微型化SJ冷却技术在SJ的特性变化规律、效率及噪声等方面存在的难点，为其未来发展提供探究方向。

关键词: 合成射流, 微电子机械系统, 冷却技术, 传热特性, 散热应用

Abstract: Although the heat dissipation problem of MEMS can be solved by existing common cooling techniques, it is still a serious challenge to achieve the efficient heat dissipation of electronic equipment. Compared with the traditional cooling techniques, the synthetic jet is a more efficient cooling technology, which provides a potential solution for the heat dissipation of MEMS. Firstly, the formation, the development and evolution of SJ are summarized, and the heat transfer characteristics of SJ are studied on the basis of explaining the flow-field topology. It is found that the best heat transfer performance of SJ can be obtained at the stagnation region. Secondly, the geometrical parameters of the cavity, exciter parameters and flow-field parameters affecting the heat transfer characteristics of SJ are analyzed in depth, and it is pointed out that the orifice to heat target spacing is the key factor affecting the cooling of SJ. Finally, the heat dissipation performance of various new radiators such as microchannels and fins based on SJ is discussed, and the difficulties in realizing the miniaturization of SJ cooling technology in characteristics, efficiency and noise of SJ are also analyzed, which provides the research direction for its future development.

Key words: synthetic jet, micro electro mechanical system, cooling technique, heat transfer characteristics, cooling application

中图分类号:

TB61

张立军, 刘世博, 甘振威, 徐嘉怡, 杨宁, 杨博涵, 王杭. 合成射流传热特性及其在MEMS散热应用研究[J]. 机械工程学报, 2023, 59(24): 164-176.

ZHANG Lijun, LIU Shibo, GAN Zhenwei, XU Jiayi, YANG Ning, YANG Bohan, WANG Hang. Study on the Heat Transfer Characteristics of Synthetic Jet and its Cooling Application for MEMS[J]. Journal of Mechanical Engineering, 2023, 59(24): 164-176.

参考文献

[1] 蒋桂平,赖显渺,凌维生. 中国制造2025与工业4. 0的必然性分析[J]. 装备制造技术,2021(10):185-187. JIANG Guiping,LAI Xianmiao,LING Weisheng. The Necessity Analysis of Made in China 2025 and 4. 0 in Industry[J]. Equipment Manufacturing Technology,2021(10):185-187.
[2] CHANDRATILLEKE T T,JAGANNATHA D,NARAYANASWAMY R. Synthetic jet-based hybrid heat sink for electronic cooling[M]. Croatia:InTech Open,2011.
[3] 平丽浩,钱吉裕,徐德好. 电子装备热控新技术综述(上)[J]. 电子机械工程,2008,24(1):1-10. PING Lihao,QIAN Jiyu,XU Dehao. A review of the thermal control technologies for electronic systems:part Ι[J]. Electro-Mechanical Engineering,2008,24(1):1-10.
[4] ARSHAD A,JABBAL M,YAN Y. Synthetic jet actuators for heat transfer enhancement-A critical review[J]. International Journal of Heat and Mass Transfer,2020,146(118815):1-41.
[5] HUANG Q H,HUANG Q M. International technology roadmap for semiconductors[M]. Shanghai:China Integrated Circuit,2014,184(9):25-45.
[6] 张立军,赵昕辉,王旱祥,等. H型垂直轴风力机实时高效攻角调节方法研究[J]. 机械工程学报,2018,54(10):173-181. ZHANG Lijun,ZHAO Xinhui,WANG Hanxiang,et al. Study on the real time and efficient adjustment law for H-type vertical axis wind turbine[J]. Journal of Mechanical Engineering,2018,54(10):173-181.
[7] 张立军,朱怀宝,顾嘉伟,等. 涡流发生器对垂直轴风力机翼型气动性能的影响[J]. 中南大学学报,2020,51(2):540-550. ZHANG Lijun,ZHU Huaibao,GU Jiawei,et al. Influence of vortex generator on aerodynamic performance of airfoil of the vertical axis wind turbine[J]. Journal of Central South University,2020,51(2):540-550.
[8] 梁鑫,胡院林,王文. 圆形压电振膜静态位移模型及参数优化分析[J]. 机械工程学报,2018,54(10):1-9. LIANG Xin,HU Yuanlin,WANG Wen. Analytical deflection model and parametric optimization of a circular diaphragm-type piezoactuator[J]. Journal of Mechanical Engineering,2018,54(10):1-9.
[9] 王立. 笔记本电脑合成射流式压电风扇的研究[D]. 南京:东南大学,2016. WANG Li. Research of the piezoelectric synthetic jet fan in notebookcomputers[D]. Nanjing:Southeast University,2016.
[10] GLEZER A. The formation of vortex rings[J]. Physics of Fluids,1988,31(12):3532-3542.
[11] HOLMAN R,UTTURKAR Y,MITTAL R et al. Formation criterion for synthetic jet[J]. AIAA Journal,2005,43(10):2110-2116.
[12] 王学东,柳建华,朱立珺,等. 复合射流涡环形成与演化研究[J]. 能源工程,2017(2):8-13. WANG Xuedong,LIU Jianhua,ZHU Liqun,et al. Study on the generating and developing of jet vortex rings[J]. Energy Engineering,2017(2):8-13.
[13] JAIN M,PURANIK B,AGRAWAL A. A numerical investigation of effects of cavity and orifice parameters on the characteristics of a synthetic jet flow[J]. Sensors and Actuators A:Physical,2011,165(2):351-366.
[14] LÜ Yuanwei,ZHANG Jingzhou,SHAN Yong,et al. Numerical investigation for effects of actuator parameters and excitation frequencies on synthetic jet fluidic characteristics[J]. Sensors and Actuators A:Physical,2014,219:100-111.
[15] GIL P,STRZELCZYK P. Performance and efficiency of loudspeaker driven synthetic jet actuator[J]. Experimental Thermal and Fluid Science,2016,76:163-174.
[16] 谭晓茗,张靖周. 多股自耦合射流相干流动和换热特性数值研究[J]. 航空动力学报,2008,4:642-646. TAN Xiaoming,ZHANG Jingzhou. Numerical study on the flow and heat transfer characteristics of coupled synthetic jets[J]. Journal of Aerospace Power,2008,4:642-646.
[17] TAN Xiaoming,ZHANG Jingzhou. Flow and heat transfer characteristics under synthetic jets impingement driven by piezoelectric actuator[J]. Experimental Thermal and Fluid Science,2013,48:134-146.
[18] FUKIBA K,OTA K,HARASHINA Y. Heat transfer enhancement of a heated cylinder with synthetic jet impingement from multiple orifices[J]. International Communications in Heat and Mass Transfer,2018,99:1-6.
[19] JACOB A,SHAFI K A,ROY K E R. Heat transfer characteristics of piston-driven synthetic jet[J]. International Journal of Thermofluids,2021,11:100104.
[20] CHAUDHARI M,PURANIK B,AGRAWAL A. Heat transfer characteristics of synthetic jet impingement cooling[J]. International Journal of Heat and Mass Transfer,2010,53(5-6):1057-1069.
[21] 郭志伟. 压电合成射流散热器的传热特性研究[D]. 西安:西安电子科技大学,2018. GUO Zhiwei. Heat transfer characteristics of piezoelectric synthetic jet heat sinks[D]. Xi'an:Xidian University,2018.
[22] GALLAS Q,HOLMAN R,NISHIDA T,et al. Lumped element modeling of piezoelectric-driven synthetic jet actuators[J]. AIAA Journal,2003,41(2):240-247.
[23] PAVLOVA A,AMITAY M. Electronic cooling using synthetic jet impingement[J]. Journal of Heat Transfer 2006,128(9):897-907.
[24] FIRDAUS S M,ABDULLAH M Z,ABDULLAH M K,et al. Heat transfer performance of a synthetic jet at various driving frequencies and diaphragm amplitude[J]. Arabian Journal for Science and Engineering,2019,44(2):1043-1055.
[25] RHAKASYWI D,KOSASIH E A,Irwansyah R. Computational and experimental study of heat transfer on the heat sink with an impinging synthetic jet under various excitation wave[J]. Case Studies in Thermal Engineering,2021,26:101106.
[26] CHAUDHARI M B,PURANIK B,AGRAWAL A. Heat transfer characteristics of a heat sink in presence of a synthetic jet[J]. IEEE Transactions on Components,Packaging and Manufacturing Technology,2012,2(3):457-463.
[27] 邓雄,夏智勋,罗振兵,等. 基于合成双射流与翅片主-被动组合的大功率LED阵列散热实验研究[J]. 光电子·激光,2014,25(12):2272-2278. DENG Xiong,XIA Zhixun,LUO Zhenbing,et al. Experimental investigation on the heat dissipation for high-power LED arrays using an active and passivecombination structure of dual synthetic jets and a fin[J]. Journal of Optoelectronics Laser,2014,25(12):2272-2278.
[28] TALAPATI R J,KATTI V V. Influence of synthetic air jet temperature on local heat transfer characteristics of synthetic air jet impingement[J]. International Communications in Heat and Mass Transfer,2022,130:105796.
[29] GHAFFARI O,IKHLAQ M,ARIK M. An experimental study of impinging synthetic jets for heat transfer augmentation[J]. International Journal of Air-Conditioning and Refrigeration,2015,23(3):1-11.
[30] GRECO C S,PAOLILLO G,IANIRO A,et al. Effects of the stroke length and nozzle-to-plate distance on synthetic jet impingement heat transfer[J]. International Journal of Heat and Mass Transfer,2018,117:1019-1031.
[31] KRISHAN G,AW K C,SHARMA R N. Synthetic jet impingement heat transfer enhancement-a review[J]. Applied Thermal Engineering,2019,149:1305-1323.
[32] LI Ping,HUANG Xinyue,GUO Dingzhang. Numerical analysis of dominant parameters in synthetic impinging jet heat transfer process[J]. International Journal of Heat and Mass Transfer,2020,150:119280.
[33] 薛玉卿,陈学永,蔡艳召,等. 微通道高效冷却技术综述[C]//第九届中国航空学会青年科技论坛论文集(1),北京:中航出版传媒有限公司,2020:4-13. XUE Yuqing,CHEN Xueyong,CAI Yanzhao,et al. Review of microchannel efficient cooling technology[C]//The 9th China Aeronautical Society Youth Science and Technology Forum proceedings (1),Beijing:China Aviation Publishing&Media Co.,Ltd.,2020:4-13.
[34] TIMCHENKO V,REIZES J,LEONARDI E. A numerical study of enhanced microchannel cooling using a synthetic jet actuator[J]. Analytica Chimica Acta,2004,173:3-21.
[35] CHANDRATILLEKE T T,JAGANNATHA D,NARAYANASWA MY R. Heat transfer enhancement in microchannels with cross-flow synthetic jets[J]. International Journal of Thermal Sciences,2010,49(3):504-513.
[36] SOURTIJI E,PELES Y. Flow boiling in microchannel with synthetic jet in cross-flow[J]. International Journal of Heat and Mass Transfer,2020,147:119023.
[37] LEE A,YEOH G H,TIMCHENKO V,et al. Heat transfer enhancement in micro-channel with multiple synthetic jets[J]. Applied Thermal Engineering,2012,48:275-288.
[38] QIU Yunlong,Hu Wenjie,Wu Changju,et al. Flow and heat transfer characteristics in a microchannel with a circular synthetic jet[J]. International Journal of Thermal Sciences,2021,164:106911.
[39] 宋建,蔡家斌,熊贤沙,等. 翅片管式换热器换热性能研究[J]. 热带农业工程,2021,45(4):7-10. SONG Jian,CAI Jiabin,XIONG Xiansha,et al. Research on heat exchange performance of fin-tube heat exchanger[J]. Tropical Agricultural Encineering,2021,45(4):7-10.
[40] MAHALINGAM R,RUMIGNY N,GLEZER A. Thermal management using synthetic jet ejectors[J]. IEEE Transactions oncomponents and packaging technologies,2004,27(3):439-444.
[41] MAHALINGAM R,GLEZER A. Design and thermal characteristics of a synthetic jet ejector heat sink[J]. Electron Packag,2005,127(2):172-177.
[42] MAHALINGAM R,GLEZER A. Thermal management of batteries using synthetic jets:U. S. Patent 8, 030, 886[P]. 2011-10-4.
[43] GIL P,SMYK E,GALEK R,et al. Thermal,flow and acoustic characteristics of the heat sink integrated inside the synthetic jet actuator cavity[J]. International Journal of Thermal Sciences,2021,170:107171.
[44] MA Yao,XIA Zhixun,LUO Zhenbing,et al. Numerical investigation on microelectronic chip cooling using multiple orifice synthetic jet actuator based on theory field synergism[J]. Procedia Engineering,2015,126:602-606.
[45] YEOM T,SIMON T,ZHANG M,et al. Active heat sink with piezoelectric translational agitators,piezoelectric synthetic jets,and micro pin fin arrays[J]. Experimental Thermal and Fluid Science,2018,99:190-199.
[46] 罗振兵,夏智勋,邓雄,等. 合成双射流及其流动控制技术研究进展[J]. 空气动力学学报,2017,35(2):252-264,251. LUO Zhenbing,XIA Zhixun,DENG Xiong,et al. Research progress of dual synthetic jets and its flow control technology[J]. Acta Aerodynamica Sinica,2017,35(2):252-264,251.
[47] JEYALINGAM J,JABBAL M. Experimental investigation of the aeroacoustics of synthetic jet actuators in quiescent conditions[J]. Experimental investigation of the aeroacoustics of synthetic jet actuators in quiescent conditions,2018,280:52-60.
[48] CRITTENDEN T M,GLEZER A. A high-speed,compressible synthetic jet[J]. Physics of Fluids,2006,18(1):017107.
[49] 额日其太,张亮. 活塞式合成射流激励器效率分析与改进研究[J]. 推进技术,2015,36(11):1648-1655. ERIQITAI,ZHANG Liang. A study of efficiency improvement of piston/cylinder synthetic jet actuator[J]. Journal of Propulsion Technology,2015,36(11):1648-1655.
[50] ZHANG Lijun,LIU Shibo,LIN Jingxue,et al. Effects of loudspeaker-driven synthetic jet actuator parameters on the characteristics of the synthetic jet[J]. Applied Acoustics,2022,197:108943.
[51] 高智刚,尚小龙,郑达文,等. 非均匀热流下功率模块微小通道热沉传热特性研究[J]. 机械工程学报,2023,59(4):257-264. GAO Zhigang,SHANG Xiaolong,ZHENG Dawen,et al. Heat transfer characteristics analysis of microchannel heat sink on power module with non-uniform heating dissipation[J]. Journal of Mechanical Engineering,2023,59(4):257-264.
[52] WANG Baicun,ZHOU Huiying,YANG Geng,et al. Human digital twin(HDT) driven human-cyber-physical systems:Key technologies and applications[J]. Chinese Journal of Mechanical Engineering,2022,35:11.
[53] 张立军,胡阔亮,焦刘阳,等. 大型H型垂直轴风电机组排布方式[J]. 中国石油大学学报,2022,46(1):147-154. ZHANG Lijun,HU Kuoliang,JIAO Liuyang,et al. Arrangement mode of large H-type vertical axis wind turbines[J]. Journal of China University of Petroleum,2022,46(1):147-154.
[54] JIANG Shan,LIU Xuejun,LIU Jianpeng,et al. Flexible metamaterial electronics[J]. Advanced Materials,2022,34(52):2200070.
[55] 孙魁元,赵亮,韩宝虎,等. 声能疏通系统在煤矿筒仓清堵中的应用[J]. 露天采矿技术,2020,35(3):52-54,58. SUN Kuiyuan,ZHAO Liang,HAN Baohu,et al. Application of acoustic energy dredge system in clearing blockage of coal mine silo[J]. Opencast Mining Technology,2020,35(3):52-54,58.
[56] 任黎晔. 低强度超声波促进污水短程硝化研究[D]. 赣州:江西理工大学,2020. REN Lihua. Research on low-intensity ultrasound promoting partial nitrification[J]. Ganzhou:Jiangxi University of Science and Technology,2020.