面向金属基材的清洗技术及清洁度评价方法研究新进展

doi:10.3901/JME.2023.13.290

机械工程学报 ›› 2023, Vol. 59 ›› Issue (13): 290-313.doi: 10.3901/JME.2023.13.290

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面向金属基材的清洗技术及清洁度评价方法研究新进展

赵勇¹, 郭江^1,2, 冯健¹, 王钦强¹, 龙鹏宇¹, 张金龙¹, 张林伟¹, 王朔¹, 孟令刚^2,3, 金洙吉¹, 康仁科¹

1. 大连理工大学精密与特种加工教育部重点实验室大连 116024;
2. 大连理工大学宁波研究院宁波 315000;
3. 大连理工大学材料科学与工程学院大连 116024

收稿日期:2022-07-21 修回日期:2023-03-04 出版日期:2023-07-05 发布日期:2023-08-15
通讯作者: 郭江(通信作者),男,1982年出生,博士,教授,博士研究生导师。主要研究方向为精密与超精密加工、表面清洁与评价、构筑成形技术、中子光学等。E-mail:guojiang@dlut.edu.cn
作者简介:赵勇,男,1994年出生,博士研究生。主要研究方向为表面清洗与评价、构筑成形技术、基材表面处理技术。E-mail:yongzhao@mail.dlut.edu.cn
基金资助:
国家重点研发计划资助项目(2018YFA0702900)。

Recent Progress of Cleaning Technologies and Cleanliness Evaluation Methods for Metal Substrates

ZHAO Yong¹, GUO Jiang^1,2, FENG Jian¹, WANG Qinqiang¹, LONG Pengyu¹, ZHANG Jinlong¹, ZHANG Linwei¹, WANG Shuo¹, MENG Linggang^2,3, JIN Zhuji¹, KANG Renke¹

1. Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024;
2. Ningbo Institute, Dalian University of Technology, Ningbo 315000;
3. School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024

Received:2022-07-21 Revised:2023-03-04 Online:2023-07-05 Published:2023-08-15

摘要/Abstract

摘要： 清洗技术及清洁度评价的发展已难以满足制造业日益提升的要求，因此综述清洗技术及清洁度评价方法变得尤为重要。探讨了面向金属基材的干式及湿式清洗技术的原理、典型案例及发展水平；分析了清洁度定性及定量评价方法的特点、评价标准及使用范围。在此基础上，指出了清洗技术及清洁度评价方法的发展趋势。分析表明：高效复合清洗工艺及绿色清洗技术、多样化的清洁度评价方法及面向特定工艺的清洁度评价体系将是未来研究的重点关注问题；此外，提高基材初始清洁度，重视基材主动清洗技术将是进一步提升金属基材表面清洁度的关键。以金属基材的清洗及评价为视角系统地综述了清洗技术及清洁度评价方法的研究进展，为后续的相关研究提供了全面的参考。

关键词: 清洗技术, 清洁度评价方法, 清洗机理, 金属基材

Abstract: Reviewing the cleaning technologies and cleanliness evaluation methods becomes essential as the development of cleaning technologies and cleanliness evaluation methods has failed to fulfil the rising demands of the manufacturing industry. The principle, typical cases, and development status of dry and wet cleaning technologies for metal substrates are analysed. The characteristics, evaluation criteria, and application scope of qualitative and quantitative cleanliness evaluation methods are summarized. On this basis, the development trend of cleaning technologies and cleanliness evaluation methods is forecasted. The analysis shows that the efficient composite cleaning process and green cleaning technologies, the diversified cleanliness evaluation methods, and the cleanliness evaluation system for specific processes will be the significant concern of future research. In addition, improving the initial cleanliness of the substrate and attaching importance to the active cleaning technologies will be the core factor to further improve surface cleanliness. The progress of cleaning technologies and cleanliness evaluation methods were systematically reviewed from the perspective of cleaning and evaluation for metal substrates, providing a comprehensive reference for subsequent research.

Key words: cleaning technology, cleanliness evaluation method, cleaning mechanism, metal substrate

中图分类号:

TG178

赵勇, 郭江, 冯健, 王钦强, 龙鹏宇, 张金龙, 张林伟, 王朔, 孟令刚, 金洙吉, 康仁科. 面向金属基材的清洗技术及清洁度评价方法研究新进展[J]. 机械工程学报, 2023, 59(13): 290-313.

ZHAO Yong, GUO Jiang, FENG Jian, WANG Qinqiang, LONG Pengyu, ZHANG Jinlong, ZHANG Linwei, WANG Shuo, MENG Linggang, JIN Zhuji, KANG Renke. Recent Progress of Cleaning Technologies and Cleanliness Evaluation Methods for Metal Substrates[J]. Journal of Mechanical Engineering, 2023, 59(13): 290-313.

参考文献

[1] 郭东明. 高性能制造[J]. 机械工程学报,2022,58(21):225-242. GUO Dongming. High-performance manufacturing[J]. Journal of Mechanical Engineering,2022,58(21):225-242.
[2] 单腾,王思捷,殷凤仕,等. 激光清洗的典型应用及对基体表面完整性影响的研究进展[J]. 材料导报,2021,35(11):11163-11172. SHAN Teng,WANG Sijie,YIN Fengshi,et al. A review of the application of laser cleaning and its influences on the substrate surface integrity[J]. Materials Reports,2021,35(11):11163-11172.
[3] 吕平. 干冰微粒喷射技术综述[J]. 真空科学与技术学报,2016,36(8):955-961. LÜ Ping. Latest progress in cleaning/polishing of delicate surfaces by CO₂ snow jet spraying[J]. Chinese Journal of Vacuum Science and Technology,2016,36(8):955-961.
[4] SHERMAN R. Carbon dioxide snow cleaning[J]. Particulate Science and Technology,2007,25(1):37-57.
[5] KING J W,WILLIAMS L L. Utilization of critical fluids in processing semiconductors and their related materials[J]. Current Opinion in Solid State and Materials Science,2003,7(4):413-424.
[6] MASON T J. Ultrasonic cleaning:An historical perspective[J]. Ultrasonics Sonochemistry,2016,29:519-523.
[7] BREMS S,HAUPTMANN M,CAMEROTTO E,et al. Nanoparticle removal with megasonics:A review[J]. ECS Journal of Solid State Science and Technology,2014,3(1):3010-3015.
[8] 武爽爽,贾秀杰,熊胜,等. 面向再制造的油漆清洗技术综述[J]. 表面技术,2021,50(3):51-65. WU Shuangshuang,JIA Xiujie,XIONG Sheng,et al. Review of paint cleaning technology for remanufacturing[J]. Surface Technology,2021,50(3):51-65.
[9] 马玉山,王鑫林,何涛,等. 金属表面腐蚀层及涂层的激光干式清洗研究进展[J]. 表面技术,2020,49(2):124-134. MA Yushan,WANG Xinlin,HE Tao,et al. Research progress in dry laser cleaning on corrosion and coating layers of metal surfaces[J]. Surface Technology,2020,49(2):124-134.
[10] KREEFT D,ARKENBOUT E A,HENSELMANS P W J,et al. Review of techniques to achieve optical surface cleanliness and their potential application to surgical endoscopes[J]. Surgical Innovation,2017,24(5):509-527.
[11] 雷正龙,田泽,陈彦宾. 工业领域的激光清洗技术[J]. 激光与光电子学进展,2018,55(3):60-72. LEI Zhenglong,TIAN Ze,CHEN Yanbin. Laser cleaning technology in industrial fields[J]. Laser and Optoelectronics Progress,2018,55(3):60-72.
[12] KOHLI R,MITTAL K L. Developments in surface contamination and cleaning:Detection,characterization,and analysis of contaminants[M]. New York:William Andrew INC,2012.
[13] 朱洪浩,夏丹,史中正,等. 热输入参量对激光清洗TA15表面氧化层的影响[J]. 中国表面工程,2019,32(6):132-139. ZHU Honghao,XIA Dan,SHI Zhongzheng,et al. Effects of heat input technological parameters on laser cleaning of surface oxide layer of TA15[J]. China Surface Engineering,2019,32(6):132-139.
[14] LI Z C,ZHANG D H,SU X,et al. Removal mechanism of surface cleaning on TA15 titanium alloy using nanosecond pulsed laser[J]. Optics and Laser Technology,2021,139:106998.
[15] KIM J E,SONG M K,HAN M S,et al. A study on the application of laser cleaning process in shipbuilding industries using 100 W fiber laser[J]. Journal of Mechanical Science and Technology,2021,35(4):1421-1427.
[16] 李志超,徐杰,张东赫,等. TA15钛合金氧化膜激光清洗温度场有限元模拟[J]. 中国科学:技术科学,2021,52(2):318-332. LI Zhichao,XU Jie,ZHANG Donghe,et al. Finite element simulation of temperature field in laser cleaning of TA15 titanium alloy oxide film[J]. Scientia Sinica Technologica,2021,52(2):318-332.
[17] SHI T Y,WANG C M,MI G Y,et al. A study of microstructure and mechanical properties of aluminum alloy using laser cleaning[J]. Journal of Manufacturing Processes,2019,42:60-66.
[18] ZHU G D,WANG S R,CHENG W,et al. Investigation on the surface properties of 5A12 aluminum alloy after Nd:YAG laser cleaning[J]. Coatings,2019,9(9):578.
[19] LIU B W,MI G Y,WANG C M. Research on grain refinement and wear behavior of micro-remelted TA15 alloy surface by laser cleaning[J]. Materials Chemistry and Physics,2021,259:124022.
[20] ZHOU C,LI H G,CHEN G Y,et al. Effect of single pulsed picosecond and 100 nanosecond laser cleaning on surface morphology and welding quality of aluminium alloy[J]. Optics and Laser Technology,2020,127:106197.
[21] LIU B W,WANG C M,Mi G Y,et al. Oxygen content and morphology of laser cleaned 5083 aluminum alloy and its influences on weld porosity[J]. Optics and Laser Technology,2021,140:107031.
[22] 夏佩云,尹玉环,蔡爱军,等. 2219铝合金阳极氧化膜焊前激光清洗工艺研究[J]. 中国激光,2019,46(1):115-121. XIA Peiyun,YIN Yuhuan,CAI Aijun,et al. Laser cleaning process of 2219 aluminum alloy anodic oxide film before welding[J]. Chinese Journal of Lasers,2019,46(1):115-121.
[23] ZHANG G X,HUA X M,HUANG Y,et al. Investigation on mechanism of oxide removal and plasma behavior during laser cleaning on aluminum alloy[J]. Applied Surface Science,2020,506:144666.
[24] 刘世光,孙树峰,王萍萍,等. 激光入射角度对去除2024铝合金表面油漆的影响[J]. 激光与光电子学进展,2022,59(17):270-278. LIU Shiguang,SUN Shufeng,WANG Pingping,et al. Effect of laser incident angle on paint removal of 2024 aluminum alloy surface[J]. Laser and Optoelectronics Progress,2022,59(17):270-278.
[25] HU C Y,HE G Y,CHEN J,et al. Research on cleaning mechanism of anti-erosion coating based on thermal and force effects of laser shock[J]. Coatings,2022,10(7):683.
[26] LU Y,YANG L J,WANG Y,et al. Paint removal on the 5A06 aluminum alloy using a continuous wave fiber laser[J]. Coatings,2019,9(8):488.
[27] ZHU G D,WANG S R,CHENG W,et al. Corrosion and wear performance of aircraft skin after laser cleaning[J]. Optics and Laser Technology,2020,132:106475.
[28] LI Y K,WANG C M,MI G Y. Influence of cleaning modes on the microstructure and performance of 5083 alloy substrate[J]. Journal of Mechanical Science and Technology,2021,35(9):3943-3949.
[29] BELOSLUDTSEV A,BITINAITIS I,BALTRUŠAITIS K. Investigation of the laser cleaning process for IBS grids in optical coating technology[J]. International Journal of Advanced Manufacturing Technology,2021,114:2863-2869.
[30] ZHU L X,SUN B T,LI Z,et al. The weld quality improvement via laser cleaning pre-treatment for laser butt welding of the HSLA steel plates[J]. Welding in the World,2022,64:1715-1723.
[31] ZHANG F D,LIU C,SUBKA C,et al. Corrosion behaviour of laser-cleaned AA7024 aluminium alloy[J]. Applied Surface Science,2017,11:452-461.
[32] AHN D,JANG D,PARK T,et al. Laser removal of lubricating oils from metal surfaces[J]. Surface and Coatings Technology,2012,206:3751-3757.
[33] TURNER M,CROUSE P,LI L. Comparison of mechanisms and effects of Nd:YAG and CO₂ laser cleaning of titanium alloys[J]. Applied Surface Science,2006,252(13):4792-4797.
[34] ARNOLD N. Theoretical description of dry laser cleaning[J]. Applied Surface Science,2003,208:15-22.
[35] GROJO D,CROS A,Delaporte P,et al. Experimental investigation of ablation mechanisms involved in dry laser cleaning[J]. Applied Surface Science,2007,253(19):8309-8315.
[36] KUMAR A,BISWAS D J. Particulate size and shape effects in laser cleaning of heavy metal oxide loose contamination off clad surface[J]. Optics and Laser Technology,2018,106:286-293.
[37] 周建忠,李华婷,孙奇,等. 基于清洗表面形貌的AH32钢激光除锈机制[J]. 光学精密工程,2019,27(8):1754-1764. ZHOU Jianzhong,LI Huating,SUN Qi,et al. Laser derusting mechanism of AH32 steel based on cleaned surface topography[J]. Optics and Precision Engineering,2019,27(8):1754-1764.
[38] 李鑫炎,李灿阳,王丹,等. 激光扫描速度对Q345钢表面锈层清洗质量的影响[J]. 中国激光,2020,47(10):112-120. LI Xinyan,LI Canyang,WANG Dan,et al. Effect of laser scanning speeds on cleaning quality of rusted layer on Q345 steel surface[J]. Chinese Journal of Lasers,2020,47(10):112-120.
[39] MA M,WANG L M,LI J F,et al. Investigation of the surface integrity of Q345 steel after Nd:YAG laser cleaning of oxidized mining parts[J]. Coatings,2020,10(8):716.
[40] 孟建兵. 大气常压等离子体弧清洗理论与关键技术研究[D]. 大连:大连理工大学,2009. MENG Jianbing. Study on theory and key technologies of atmospheric pressure plasma arc cleaning[D]. Dalian:Dalian University of Technology,2009.
[41] MOZETIČ M. Discharge cleaning with hydrogen plasma[J]. Vacuum,2001,61(2-4):367-371.
[42] PRADHAN S K,JEEVITHA M,SINGH S K. Plasma cleaning of old Indian coin in H₂-Ar atmosphere[J]. Applied Surface Science,2015,357:445-451.
[43] ZHANG Z,YE Z,WANG Z,et al. The mechanism study of mixed Ar/O₂ plasma-cleaning treatment on niobium surface for work function improvement[J]. Applied Surface Science,2019,475:143-150.
[44] UDDIN M A,ALAM M O,CHAN Y C,et al. Plasma cleaning of the flex substrate for flip-chip bonding with anisotropic conductive adhesive film[J]. Journal of Electronic Materials,2003,32(10):1117-1124.
[45] DONG B,DRIVER M S,EMESH I,et al. Surface chemistry and fundamental limitations on the plasma cleaning of metals[J]. Applied Surface Science,2016,384:294-297.
[46] LI W. A study of plasma-cleaned Ag-plated Cu leadframe surfaces[J]. Journal of Electronic Materials,2010,39(3):295-302.
[47] ISABELL T C,FISCHIONE P E,O'KEEFE C,et al. Plasma cleaning and its applications for electron microscopy[J]. Microscopy and Microanalysis,1999,5(2):126-135.
[48] ONO S,TEII S,SUZUKI Y,et al. Effect of gas composition on metal surface cleaning using atmospheric pressure microwave plasma[J]. Thin Solid Films, 2009, 518(3):981-986.
[49] 李玉海,白清顺,杨德伦,等. 铝合金表面有机污染物等离子体清洗机理及验证[J]. 中国表面工程,2022,33(6):58-67. LI Yuhai,BAI Qingshun,YANG Delun,et al. Mechanism and verification of plasma cleaning of organic contaminant on aluminum alloy surface[J]. China Surface Engineering,2022,33(6):58-67.
[50] RODRÍGUEZ-VILLANUEVA C,ENCINAS N,ABENOJAR J,et al. Assessment of atmospheric plasma treatment cleaning effect on steel surfaces[J]. Surface and Coatings Technology,2013,236:450-456.
[51] 林建平,王询,杨晓军,等. 常压空气等离子处理对铝合金胶接接头强度的影响[J]. 中国表面工程,2017,30(3):48-57. LIN Jianping,WANG Xun,YANG Xiaojun,et al. Effects of atmospheric pressure air plasma treatment on static strength of adhesive-bonded aluminum alloy[J]. China Surface Engineering,2017,30(3):48-57.
[52] MUÑOZ J,BRAVO J A,CALZADA M D. Aluminum metal surface cleaning and activation by atmospheric-pressure remote plasma[J]. Applied Surface Science,2017,407:72-81.
[53] DONG X J,MENG J B,WEI X T,et al. Surface modification of stainless steel using an atmospheric pressure plasma arc driven by an external transverse-alternating magnetic field[J]. Chemical Engineering Transactions,2015,46:97-102.
[54] 秦剑,温彤,郑杰,等. 锻件表面氧化皮及残留润滑剂干冰清理的可行性研究[J]. 热加工工艺,2017,46(11):110-112. QIN Jian,WEN Tong,ZHENG Jie,et al. Feasibility study of dry ice cleaning surface oxide skin and residual lubricant on forgings[J]. Hot Working Technology,2017,46(11):110-112.
[55] DZIDO A,KRAWCZYK P,BADYDA K,et al. Operational parameters impact on the performance of dry-ice blasting nozzle[J]. Energy,2021,214:118847.
[56] 孙洪孟. 干冰清洗技术研究[D]. 大连:大连理工大学,2012. SUN Hongmeng. Research of dry ice blasting technology[D]. Dalian:Dalian University of Technology,2012.
[57] DONG S J,SONG B,HANSZ B,et al. Modelling of dry ice blasting and its application in thermal spray[J]. Materials Research Innovations,2013,16(1):61-66.
[58] MORRIS D J. Cleaning of diamond nanoindentation probes with oxygen plasma and carbon dioxide snow[J]. Review of Scientific Instruments,2009,80(12):126102.
[59] YANG S C,HUANG K S,LIN Y C. Optimization of a pulsed carbon dioxide snow jet for cleaning CMOS image sensors by using the Taguchi method[J]. Sensors and Actuators A:Physical,2007,139(1-2):265-271.
[60] KIM P,SEOK J. Dynamic modelling and simulation of a cryogenic carbon dioxide cleaning process[J]. Proceedings of the Institution of Mechanical Engineers,Part E:Journal of Process Mechanical Engineering,2010,224(4):213-221.
[61] LIU W,ZHANG B,LI Y,et al. An environmentally friendly approach for contaminants removal using supercritical CO₂ for remanufacturing industry[J]. Applied Surface Science,2014,292:142-148.
[62] LIU W,LI M,SHORT T,et al. Supercritical carbon dioxide cleaning of metal parts for remanufacturing industry[J]. Journal of Cleaner Production,2015,93:339-346.
[63] 卢斌斌,卢义刚. 超声强化超临界二氧化碳除锈除油污[J]. 声学技术,2020,39(3):306-310. LU Binbin,LU Yigang. Ultrasound enhanced supercritical carbon dioxide rust removal and oil removal[J]. Technical Acoustics,2020,39(3):306-310.
[64] 庞昊斐,祝锡晶,赵轩达. 高速气流喷射干式清洗理论及实验研究[J]. 制造技术与机床,2016(7):70-74. PANG Haofei,ZHU Xijing,ZHAO Xuanda. Theoretical and experimental study of dry cleaning method using high-speed air jet[J]. Manufacturing Technology and Machine Tool,2016(7):70-74.
[65] ZHAO Y,JIN Z J,XU B,et al. Effect of surface cleaning on interface bonding performance for 316H stainless steel joints manufactured by additive forging[J]. Materials & Design,2021,210:110025.
[66] 庞昊斐. 超声干式清洗技术的理论研究与应用[D]. 太原:中北大学,2017. PANG Haofei. Theory research and application of ultrasonic dry cleaning technology[D]. Taiyuan:North University of China,2017.
[67] LI Y K,WANG C M,MI G Y. Influence of cleaning modes on the microstructure and performance of 5083 alloy substrate[J]. Journal of Mechanical Science and Technology,2021,35(9):3943-3949.
[68] 丁鸿,禹静,刘立人,等. 量块的超声清洗效果评价方法研究[J]. 中国计量大学学报,2021,32(2):196-202. DING Hong,YU Jing,LIU Liren,et al. Research on the evaluation method of ultrasonic cleaning effect of gauge blocks[J]. Journal of China University of Metrology,2021,32(2):196-202.
[69] VETRIMURUGAN R. Optimization of hard disk drive heads cleaning by using ultrasonics and prevention of its damage[C]//Elsevier. 2nd International Conference on Chemistry and Chemical Process,May 05-06,2012,Kuala Lumpur. Amsterdam,Elsevier Science BV,2012,3:222-230.
[70] 赫亮. 航空发动机低涡轴超声波清洗技术研究[D]. 大连:大连理工大学,2016. HE Liang. Research on the ultrasonic cleaning technology of aero-engine low pressure turbine shaft[D]. Dalian:Dalian University of Technology,2016.
[71] 李义才. 发动机再制造中铝合金活塞表面积碳清洗工艺的研究[D]. 西安:长安大学,2019. LI Yicai. Study on carbon cleaning process of aluminum alloy piston surface in engine remanufacturing[D]. Xi'an:Chang'an University,2019.
[72] AKTIJ A S,TAGHIPOUR A,RAHIMPOUR A,et al. A critical review on ultrasonic-assisted fouling control and cleaning of fouled membranes[J]. Ultrasonics,2020,108:106228.
[73] CAO Q B,CHENG J H,FENG Q C,et al. Surface cleaning and oxidative effects of ultrasonication on the flotation of oxidized pyrite[J]. Powder Technology,2017,311:390-397.
[74] CHU C L,LU T Y,FUH Y K. The suitability of ultrasonic and megasonic cleaning of nanoscale patterns in ammonia hydroxide solutions for particle removal and feature damage[J]. Semiconductor Science and Technology,2020,35(4):045001.
[75] 王启博,宁大勇,侯交义,等. 超高压水射流盘式清洗装置工作效率试验研究[J]. 液压与气动,2019(3):19-25. WANG Qibo,NING Dayong,HOU Jiaoyi,et al. Experimental study on working efficiency of super high pressure water jet disc cleaning device[J]. Chinese Hydraulics & Pneumatics,2019(3):19-25.
[76] 郭琦. 面向再制造的高压水射流清洗研究与应用[D]. 济南:山东大学,2015. GUO Qi. The research and application of high-pressure waterjet cleaning based on remanufacturing[D]. Jinan:Shandong University,2015.
[77] TUCK J P,ALBERINI F,WARD D,et al. Cleaning of thick viscoplastic surface deposits using an impinging jet:Effect of process variables[J]. Journal of Food Engineering,2020,266:109699.
[78] SOURD X,ZITOUNE R,HEJJAJI A,et al. Plain water jet cleaning of titanium alloy after abrasive water jet milling:Surface contamination and quality analysis in the context of maintenance[J]. Wear,2021,477:203833.
[79] TAM A C,LEUNG W P,ZAPKA W,et al. Laser-cleaning techniques for removal of surface particulates[J]. Journal of Applied Physics,1992,71(7):3515-3523.
[80] TAM A C,PARK H K,GRIGOROPOULOS C P. Laser cleaning of surface contaminants[J]. Applied Surface Science,1998,127-129:721-725.
[81] 雷正龙,孙浩然,陈彦宾,等. 不同激光清洗方法对高强钢表面锈蚀层的去除研究[J]. 中国激光,2019,46(7):86-71. LEI Zhenglong,SUN Haoran,CHEN Yanbin,et al. Elimination of rusting layer from high strength steel surface using different laser cleaning methods[J]. Chinese Journal of Lasers,2019,46(7):86-71.
[82] KIM D,LEE J. On the physical mechanisms of liquid-assisted laser cleaning[J]. Journal of Applied Physics,2003,93(1):762-764.
[83] LIM H,KIM D. Laser-assisted chemical cleaning for oxide-scale removal from carbon steel surfaces[J]. Journal of Laser Applications,2004,16(1):25-30.
[84] KIM T H,BUSNAINA A,PARK J G,et al. Nanoscale particle removal using wet laser shockwave cleaning[J]. ECS Journal of Solid State Science and Technology,2012,1(2):70-77.
[85] DEVARAPALLI V K,PERI M D M,CETINKAYA C. Particle removal with liquid-film-enhanced laser-induced plasma[J]. Journal of Adhesion Science and Technology,2006,20(2-3):233-243.
[86] 王剑,孟浩杰,李朋,等. 喷丸和盐酸酸洗对2205双相不锈钢热轧板氧化层微观结构的影响[J]. 金属热处理,2021,46(2):74-80. WANG Jian,MENG Haojie,LI Peng,et al. Effect of shot peening and hydrochloric acid pickling on oxide layer microstructure of 2205 duplex stainless steel hot-rolled sheet[J]. Heat Treatment of Metals,2021,46(2):74-80.
[87] GARMSIRI E,RASOULI Y,ABBASI M,et al. Chemical cleaning of mullite ceramic microfiltration membranes which are fouled during oily wastewater treatment[J]. Journal of Water Process Engineering,2017,19:81-95.
[88] DONGRE G,RAJURKAR A,GONDIL R,et al. Removal of surface spatter and recast layer by chemical cleaning[J]. Materials Today Proceedings,2019,7(18):4763-4772.
[89] WANG X,LI J,WANG L,et al. A novel de-rusting method with molten salt precleaning and laser cleaning for the recycling of steel parts[J]. Clean Technologies and Environmental Policy,2021,23(5):1403-1414.
[90] CHEN J W,MU H,HU Q,et al. Investigation on the process of dry ice cleaning insulators[C]//Institute of Physics. 2018 5th International Conference on Advanced Composite Materials and Manufacturing Engineering,June 16-17,2018,Xishuangbanna. Ireland:Institute of Physics,2018,394:042112.
[91] ZHANG C,QIU J T,KONG F,et al. Plasma surface treatment of Cu by nanosecond-pulse diffuse discharges in atmospheric air[J]. Plasma Science and Technology,2017,1(20):014011.
[92] 史天意,周龙早,王春明,等. 基于机器视觉的铝合金激光清洗实时检测系统[J]. 中国激光,2019,46(4):83-89. SHI Tianyi,ZHOU Longzao,WANG Chunming,et al. Machine vision-based real-time monitor system for laser cleaning aluminum alloy[J]. Chinese Journal of Lasers,2019,46(4):83-89.
[93] ZHANG S L,SUEBKA C,LIU H,et al. Mechanisms of laser cleaning induced oxidation and corrosion property changes in AA5083 aluminum alloy[J]. Journal of Laser Application,2019,31(1):012001.
[94] 赵文远,刘建勇,羊送球. 基于Beckmann-Kirchhorff简化模型表征钛合金板材表面清洁度[J]. 激光与光电子学进展,2022,59(11):1114006. ZHAO Wenyuan,LIU Jianyong,YANG Songqiu. Characterization of surface cleanliness of titanium alloy sheet based on Beckmann-Kirchhorff simplified model[J]. Laser and Optoelectronics Process,2022,59(11):1114006.
[95] 陈俊宏,温鹏,常保华,等. 钛合金激光清洗及其对激光焊接气孔的影响[J]. 中国机械工程,2020,31(4):379-383. CHEN Junhong,WEN Peng,CHANG Baohua,et al. Laser cleaning of titanium alloy and its effect on laser welding porosity[J]. China Mechanical Engineering,2020,31(4):379-383.
[96] LI X,GUAN Y C. Real-time monitoring of laser cleaning for hot-rolled stainless steel by laser-induced breakdown spectroscopy[J]. Metals,2021,11(5):790.
[97] 佟艳群,陆勤慧,周建忠,等. 铝合金焊前激光清洗的等离子体光谱在线检测[J]. 光谱学与光谱分析,2020,40(1):255-260. TONG Yanqun,LU Qinhui,ZHOU Jianzhong,et al. On-line plasma detection of laser cleaning of aluminum alloy before welding[J]. Spectroscopy and Spectral Analysis,2020,40(1):255-260.
[98] ZOU W F,SONG F,LUO Y. Characteristics of audible acoustic signal in the process of laser cleaning of paint on metal surface[J]. Optics and Laser Technology,2021,144:107388.
[99] 李烨,谭昭怡,张东,等. 干冰喷射去除表面放射性污染技术研究[J]. 辐射防护,2018,38(2):142-147. LI Ye,TAN Zhaoyi,ZHANG Dong,et al. Experimental study on decontamination of surface radioactivity by dry-ice blasting[J]. Radiation Protection,2018,38(2):142-147.
[100] KING M O,STAFF M T,WHITE A L,et al. UV fluorescence as a method of high throughput surface cleanliness assessment:A comparison with XPS[J]. International Journal of Adhesion and Adhesives,2021,104:102739.
[101] LIU Y H,HIRAMA D,MATSUSAKA S. Particle removal process during application of impinging dry ice jet[J]. Powder Technology,2012,217:607-613.
[102] 马刚. 激光诱导击穿光谱的定量分析及应用研究[D]. 杭州:杭州电子科技大学,2013. MA Gang. Quantitative analysis and application of laser-induced breakdown spectroscopy[D]. Hangzhou:Hangzhou Dianzi University,2013.

面向金属基材的清洗技术及清洁度评价方法研究新进展

Recent Progress of Cleaning Technologies and Cleanliness Evaluation Methods for Metal Substrates

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