机械工程学报 ›› 2022, Vol. 58 ›› Issue (11): 183-199.doi: 10.3901/JME.2022.11.183
唐恒1, 汤勇2, 伍晓宇1, 袁伟2, 孙亚隆2, 鲁艳军1, 彭锐涛3
收稿日期:
2021-09-02
修回日期:
2021-12-08
出版日期:
2022-06-20
发布日期:
2022-08-08
通讯作者:
汤勇(通信作者),男,1962年出生,博士,教授,博士研究生导师。主要研究方向为表面功能结构制造及其作用机理、微纳制造。E-mail:ytang@scut.edu.cn
作者简介:
唐恒,男,1989年出生,博士,副研究员,硕士研究生导师。主要研究方向为表面功能结构制造、微结构制造。E-mail:tangheng@szu.edu.cn
基金资助:
TANG Heng1, TANG Yong2, WU Xiaoyu1, YUAN Wei2, SUN Yalong2, LU Yanjun1, PENG Ruitao3
Received:
2021-09-02
Revised:
2021-12-08
Online:
2022-06-20
Published:
2022-08-08
摘要: 表面功能结构是在物体表面加工出不同形貌、不同尺度且具有特定功能的结构,其制造有别于传统机械加工。表面功能结构种类繁多、性能独特,目前已在航空航天、生物医疗、光电、新能源等众多领域得到广泛应用。随着研究的不断深入以及加工技术的快速发展,表面功能结构制造已从局部工艺性研究转变为多学科交叉的整体性设计、制造及关键技术研究。详细介绍了表面功能结构的特点以及在不同领域的应用和发展,重点综述了近十年表面功能结构制造方法的国内外研究进展,分析讨论了表面功能结构制造目前所存在的问题,并进行科学预测与展望。
中图分类号:
唐恒, 汤勇, 伍晓宇, 袁伟, 孙亚隆, 鲁艳军, 彭锐涛. 表面功能结构制造研究的新进展与发展趋势[J]. 机械工程学报, 2022, 58(11): 183-199.
TANG Heng, TANG Yong, WU Xiaoyu, YUAN Wei, SUN Yalong, LU Yanjun, PENG Ruitao. New Progress and Development Trend of Manufacturing of Functional Surface Structure[J]. Journal of Mechanical Engineering, 2022, 58(11): 183-199.
[1] LEI Yuanzhong, WU Xixing, SHENG Xiaomin, et al. Report on advance in mechanical engineering (2008-2009)-mechanical manufacturing[R]. Beijing:China Science and Technology Press, 2009. 雷源忠, 吴锡兴, 盛晓敏, 等. 机械工程学科发展报告(2008-2009)-机械制造[R]. 北京:中国科学技术出版社, 2009. [2] DENG Zhaohui, FANG Fengzhou, HAN Zhiwu, et al. Report on advance in mechanical engineering (2018-2019)-mechanical manufacturing[R]. Beijing:China Science and Technology Press, 2020. 邓朝晖, 房丰洲, 韩志武, 等. 机械工程学科发展报告(2018-2019)-机械制造[R]. 北京:中国科学技术出版社, 2020. [3] TANG Yong, ZHOU Ming, HAN Zhiwu, et al. Recent research on manufacturing technologies of functional surface structure[J]. Journal of Mechanical Engineering, 2010, 46(23):97-109. 汤勇, 周明, 韩志武, 等. 表面功能结构制造研究进展[J]. 机械工程学报, 2010, 46(23):97-109. [4] JIANG Lelun. Manufacture and thermal performance of sintered-grooved composite wick in the flattened heat pipe[D]. Guangzhou:South China University of Technology, 2011. 蒋乐伦. 扁平热管微孔槽烧结复合吸液芯成形及传热性能研究[D]. 广州:华南理工大学, 2011. [5] TANG H, TANG Y, LI J, et al. Review of the applications and developments of ultra-thin micro heat pipes for electronic cooling[J]. Applied Energy, 2018, 223:383-400. [6] YUAN W, TANG Y, YANG X. High-concentration operation of a passive air-breathing direct methanol fuel cell integrated with a porous methanol barrier[J]. Renewable Energy, 2013, 50:741-746. [7] ZHANG J, CHEN Y, XU B, et al. Effect of surface texture on wear reduction of the tilting cylinder and the valve plate for a high-speed electro-hydrostatic actuator pump[J]. Wear, 2018, 414-415:68-78. [8] NIKETH S, SAMUEL G L. Surface texturing for tribology enhancement and its application on drill tool for the sustainable machining of titanium alloy[J]. Journal of Cleaner Production, 2017, 167:253-270. [9] WU Z, DENG J, SU C, et al. Performance of the micro-texture self-lubricating and pulsating heat pipe self-cooling tools in dry cutting process[J]. International Journal of Refractory Metals and Hard Materials, 2014. [10] FILIZ S, XIE L, WEISS L E, et al. Micromilling of microbarbs for medical implants[J]. International Journal of Machine Tools and Manufacture, 2008, 48:459-472. [11] HAN Z, FU J, FENG X, et al. Bionic anti-adhesive electrode coupled with maize leaf microstructures and TiO2 coating[J]. RSC Advances, 2017, 7(72):45287-45293. [12] BERGLES A E. ExHFT for fourth generation heat transfer technology[J]. Experimental Thermal and Fluid Science, 2002, 26:335-344. [13] HUANG S, ZHU H, ZHENG Y, et al. Compound thermal performance of an arc-shaped inner finned tube equipped with Y-branch inserts[J]. Applied Thermal Engineering, 2019, 152:475-481. [14] LI H, LI R, ZHOU R, et al. Pool boiling heat transfer of multi-scale composite copper powders fabricated by sintering-alloying-dealloying treatment[J]. International Journal of Heat and Mass Transfer. 2019, 147:118962. [15] WEN R, LI Q, WANG W, et al. Enhanced bubble nucleation and liquid rewetting for highly efficient boiling heat transfer on two-level hierarchical surfaces with patterned copper nanowire arrays[J]. Nano Energy, 2017, 38:59-65. [16] GREGORCIC P, ZUPANCIC M, GOLOBIC I. Scalable surface microstructuring by a fiber laser for controlled nucleate boiling performance of high- and low-surface-tension fluids[J]. Scientific Reports, 2018, 8(1):7461. [17] ZHOU F, ZHOU W, ZHANG C, et al. Experimental and numerical studies on heat transfer enhancement of microchannel heat exchanger embedded with different shape micropillars[J]. Applied Thermal Engineering, 2020, 175:115296. [18] TANG H, WENG C, TANG Y, et al. Effect of inclination angle on the thermal performance of an ultrathin heat pipe with multi-scale wick structure[J]. International Communications in Heat and Mass Transfer, 2020, 118:104908. [19] LING W, ZHOU W, YU W, et al. Capillary pumping performance of porous copper fiber sintered wicks for loop heat pipes[J]. Applied thermal engineering, 2018, 129:1582-1594. [20] JI X, XU J, LI H, et al. Switchable heat transfer mechanisms of nucleation and convection by wettability match of evaporator and condenser for heat pipes:nano-structured surface effect[J]. Nano Energy, 2017, 38. [21] TANG Heng, TANG Yong, WAN Zhenping, et al. Fabrication and capillary performance of micro-grooved wicks for aluminium flat-plate heat pipes[J]. Journal of Mechanical Engineering, 2019, 55(6):186-193. 唐恒, 汤勇, 万珍平, 等. 平板铝热管微沟槽吸液芯的制备及毛细性能研究[J]. 机械工程学报, 2019, 55(6):186-193. [22] HAMIDNIA M, LUO Y, LI Z, et al. Capillary and thermal performance enhancement of rectangular grooved micro heat pipe with micro pillars[J]. International Journal of Heat and Mass Transfer, 2020, 153(2):119581. [23] GIBBONS M J, MARENGO M, PERSOONS T. A review of heat pipe technology for foldable electronic devices[J]. Applied Thermal Engineering, 2021, 194:117087. [24] TANG H, WENG C, TANG Y, et al. Thermal performance enhancement of an ultra-thin flattened heat pipe with multiple wick structure[J]. Applied Thermal Engineering, 2021, 183(11):116203. [25] CHEN Z, LI Y, ZHOU W, et al. Design, fabrication and thermal performance of a novel ultra-thin vapour chamber for cooling electronic devices[J]. Energy Conversion and Management, 2019, 187:221-231. [26] LIEW L A, LIN C Y, LEWIS R, et al. Flexible thermal ground planes fabricated with printed circuit board technology[J]. Journal of Electronic Packaging, 2017, 139(1):011003.1-011003.10. [27] DIJK L V, GROEP J, VELDHUIZEN L W, et al. Concepts for external light trapping and its utilization in colored and image displaying photovoltaic modules[J]. Progress in Photovoltaics:Research and Applications, 2017, 25(7):553-568. [28] XU Zhilong, XU Xipeng, HUANG Hui, et al. Progress in surface optical functional texture and preparation of crystalline silicon cells[J]. Journal of Mechanical Engineering, 2019, 55(9):166-175. 许志龙, 徐西鹏, 黄辉, 等. 晶体硅电池表面光功能织构及其制备的研究进展[J]. 机械工程学报, 2019, 55(9):166-175. [29] GAUCHER A, CATTONI A, DUPUIS C, et al. Ultrathin epitaxial silicon solar cells with inverted nanopyramid arrays for efficient light trapping[J]. Nano Letters, 2016, 16(9):5358-5364. [30] FAINGOLD Y, FADIDA S, PRAJAPATI A, et al. Efficient light trapping and broadband absorption of the solar spectrum in nanopillar arrays decorated with deep-subwavelength sidewall features[J]. Nanoscale, 2018, 10(39):18613-18621. [31] TSAI Y L, LAI K Y, LEE M J, et al. Photon management of GaN-based optoelectronic devices via nanoscaled phenomena[J]. Progress in Quantum Electronics, 2016, 49:1-25. [32] WANG S, DAI J, HU J, et al. Ultrahigh degree of optical polarization above 80% in AlGaN-based deep-ultraviolet LED with moth-eye microstructure[J]. ACS Photonics, 2018, 5(9):3534-3540. [33] DING X, TANG Y, LI Z, et al. Multichip LED modules with V-groove surfaces for light extraction efficiency enhancements considering roughness scattering[J]. IEEE Transactions on Electron Devices, 2017, 64(1):182-188. [34] CHEN H, ZHU R, HE J, et al. Going beyond the limit of an LCD's color gamut[J]. Light:Science and Applications, 2017, 6(9):e17043. [35] ZHOU Tianfeng, XIE Jiaqing, LIANG Zhiqiang, et al. Advances and prospects of molding for optical microlens array[J]. Chinese Optics, 2017, 10(5):603-618. 周天丰, 解加庆, 梁志强, 等. 光学微透镜阵列模压成形研究进展与展望[J]. 中国光学, 2017, 10(5):603-618. [36] GONG Feng, LI Kangsen, YAN Chao. Progress on precision glass molding[J]. Optics and Precision Engineering, 2018, 26(6):1380-1391. 龚峰, 李康森, 闫超. 玻璃精密模压成形的研究进展[J]. 光学精密工程, 2018, 26(6):1380-1391. [37] DONG X, ZHOU T, PANG S, et al. Defect analysis in microgroove machining of nickel-phosphide plating by small cross-angle microgrooving[J]. Journal of Nanomaterials, 2018, 2018:1-9. [38] DONG X, ZHOU T, PANG S, et al. Mechanism of burr accumulation and fracture pits formation in ultraprecision microgroove fly cutting of crystalline nickel phosphorus[J]. Journal of Micromechanics and Microengineering, 2018, 28:125008. [39] ZHOU T, ZHOU Q, XIE J, et al. Surface defect analysis on formed chalcogenide glass Ge22Se58As20 lenses after the molding process[J]. Applied Optics, 2017, 56(30):8394-8402. [40] YUAN W, TANG Y, YANG X, et al. Manufacture, characterization and application of porous metal-fiber sintered felt used as mass-transfer-controlling medium for direct methanol fuel cells[J]. Transactions of Nonferrous Metals Society of China, 2013, 23:2085-2093. [41] YUAN W, WANG A, YE G, et al. Dynamic relationship between the CO2 gas bubble behavior and the pressure drop characteristics in the anode flow field of an active liquid-feed direct methanol fuel cell[J]. Applied Energy, 2017, 188:431-443. [42] BAIK K D, LEE E H, YOON H, et al. Effect of multi-hole flow field structure on the performance of H2/O2 polymer electrolyte membrane fuel cells[J]. International Journal of Hydrogen Energy, 2019, 44(47):25894-25904. [43] LI S, ZHOU W, LIU R, et al. Fabrication of porous metal fiber sintered sheet as a flow field for proton exchange membrane fuel cell[J]. Current Applied Physics, 2020, 20:686-695. [44] LIU R, ZHOU W, LI S, et al. Performance improvement of proton exchange membrane fuel cells with compressed nickel foam as flow field structure[J]. International Journal of Hydrogen Energy, 2020, 45(35):17833-17843. [45] WANG A, YUAN W, HUANG S, et al. Structural effects of expanded metal mesh used as a flow field for a passive direct methanol fuel cell[J]. Applied Energy, 2017, 208:184-194. [46] JIANG T, ZHANG S, QIU X, et al. Preparation and characterization of tin-based three-dimensional cellular anode for lithium ion battery[J]. Journal of Power Sources, 2007, 166:503-508. [47] KIM Y L, SUN Y K, LEE S M. Enhanced electrochemical performance of silicon-based anode material by using current collector with modified surface morphology[J]. Electrochimica Acta, 2008, 53:4500-4504. [48] ZHU C, LIU Z, WANG J, et al. Novel Co2VO4 anodes using ultralight 3D metallic current collector and carbon sandwiched structures for high-performance Li-ion batteries[J]. Small, 2017, 13(34):1701260. [49] YUAN W, LUO J, PAN B, et al. Hierarchical shell/core CuO nanowire/carbon fiber composites as binder-free anodes for lithium-ion batteries[J]. Electrochimica Acta, 2017, 241:261-271. [50] YUAN W, QIU Z, CHEN YU, et al. A binder-free composite anode composed of CuO nanosheets and multi-wall carbon nanotubes for high-performance lithium-ion batteries[J]. Electrochimica Acta, 2017, 267:150-160. [51] ZHU P, GASTOL D, MARSHALL J, et al. A review of current collectors for lithium-ion batteries[J]. Journal of Power Sources, 2020, 485:229321. [52] YANG Y, YUAN W, ZHANG X, et al. A review on structuralized current collectors for high-performance lithium-ion battery anodes[J]. Applied Energy, 2020, 276:115464. [53] LUO J, YUAN W, HUANG S, et al. From checkerboard-like sand barriers to 3D Cu@CNF composite current collectors for high- performanceBatteries[J]. Advanced Science, 2018, 5:1800031. [54] CHEN Y, FENG H, WANG Y, et al. Nano-porous copper metal current collector for lithium ion batteries[J]. Materials Letters, 2018, 226:8-12. [55] CHO E, CHANG-JIAN C, WU Y, et al. Modification of aluminum current collectors with laser-scribed graphene for enhancing the performance of lithium ion batteries[J]. Journal of Power Sources, 2021, 506:230060. [56] TANG Yong, TANG Heng, WAN Zhenping, et al. Research progress of hydrodynamic lubrication of surface texture[J]. Journal of South China University of Technology (Natural Science Edition), 2017, 45(9):1-11. 汤勇, 唐恒, 万珍平, 等. 表面织构流体动压润滑性能的研究进展[J]. 华南理工大学学报:自然科学版, 2017, 45(9):1-11. [57] GUO Jiang, WANG Xingyu, ZHAO Yong, et al. Recent progress on fabrication technologies and machining performance of textured cutting tools[J]. Journal of Mechanical Engineering, 2021, 57(13):172-200. 郭江, 王兴宇, 赵勇, 等. 微织构刀具制备技术及加工性能研究新进展[J]. 机械工程学报, 2021, 57(13):172-200. [58] ZHANG L, GUO X, ZHANG K, et al. Enhancing cutting performance of uncoated cemented carbide tools by joint-use of magnetic nanofluids and micro-texture under magnetic field[J]. Journal of Materials Processing Technology, 2020, 284:116764. [59] WANG Q, YANG Y, YAO P, et al. Friction and cutting characteristics of micro-textured diamond tools fabricated with femtosecond laser[J]. Tribology International, 2021, 154:106720. [60] MAO B, SIDDAIAH A, LIAO Y, et al. Laser surface texturing and related techniques for enhancing tribological performance of engineering materials:A review[J]. Journal of Manufacturing Processes, 2020, 53:153-173. [61] ALAGAN N T, ZEMAN P, HOIER P, et al. Investigation of micro-textured cutting tools used for face turning of alloy 718 with high-pressure cooling[J]. Journal of Manufacturing Processes, 2019, 37:606-616. [62] ZHENG Qingchun, MAO Lulu, SHI Yutao, et al. Analysis of biomimetic texture surface on dynamic compression lubrication and friction reduction of artificial hip pair[J]. Journal of Mechanical Engineering, 2021, 57(11):102-111. 郑清春, 毛璐璐, 史于涛, 等. 仿生织构表面对人工髋关节副动压润滑性能及减摩性分析[J]. 机械工程学报, 2021, 57(11):102-111. [63] HU D, GUO Z, XIE X, et al. Effect of spherical-convex surface texture on tribological performance of water-lubricated bearing[J]. Tribology International, 2019, 134:341-351. [64] GAO T, ZHANG H, XU J, et al. Effects of cylindrical pit array on tribological property of Piston-Cylinder sleeve friction pair in a BW-250 slime pump[J]. Tribology International, 2020, 151:106505. [65] ZHANG D, GAO F, WEI X, et al. Fabrication of textured composite surface and its tribological properties under starved lubrication and dry sliding conditions[J]. Surface and Coatings Technology, 2018, 350:313-322. [66] LI G, CAO H, ZHANG W, et al. Enhanced osseointegration of hierarchical micro/nanotopographic titanium fabricated by microarc oxidation and electrochemical treatment[J]. ACS Applied Materials and Interfaces, 2016, 8:3840-3852. [67] WANG G, WAN Y, REN B, et al. Bioactivity of micropatterned TiO2 nanotubes fabricated by micro-milling and anodic oxidation[J]. Materials science and engineering. C, 2019, 95:114-121. [68] WANG G, WAN Y, LIU Z, et al. Incorporation of antibacterial ions on the micro/nanostructured surface and its effects on the corrosion behavior of titanium[J]. Materials Letters, 2018, 216:303-305. [69] LIU Guang, ZHANG Pengfei, CHEN Huawei, et al. Bio-inspired anti-adhesion surfaces of electrosurgical scalpel[J]. Journal of Mechanical Engineering, 2018, 54(17):21-27. 刘光, 张鹏飞, 陈华伟, 等. 载能电刀仿生防粘表面技术[J]. 机械工程学报, 2018, 54(17):21-27. [70] LU Longsheng, LI Kaikai, XIE Yingxi, et al. Research status and development trend of desorption surgical electromes[J]. Journal of Mechanical Engineering, 2020, 56(1):189-200. 陆龙生, 李凯凯, 谢颖熙, 等. 脱附性医用高频电刀的研究现状及发展趋势[J]. 机械工程学报, 2020, 56(1):189-200. [71] RONG M, LU H, WAN L, et al. Comparison of early osseointegration between laser-treated/acid-etched and sandblasted/acid-etched titanium implant surfaces[J]. Journal of Materials Science Materials in Medicine, 2018, 29:43. [72] YAN J, BEI C, HU X, et al. Titanium implant functionalized with antimiR-138 delivered cell sheet for enhanced peri-implant bone formation and vascularization[J]. Materials Science and Engineering C, 2018, 89:52-64. [73] WAN Y, WANG T, WANG Z, et al. Construction and characterization of micro/nano-topography on titanium alloy formed by micro-milling and anodic oxidation[J]. International Journal of Advanced Manufacturing Technology, 2017, 8:1-7. [74] ZHAO Q M, YI L, JIANG L B, et al. Surface functionalization of titanium with zinc/strontium-doped titanium dioxide microporous coating via microarc oxidation[J]. Nanomedicine Nanotechnology Biology and Medicine, 2019, 16:149-161. [75] ZHAO Q M, LI X K, GUO S, et al. Osteogenic activity of a titanium surface modified with silicon-doped titanium dioxide[J]. Materials Science and Engineering:C, 2020, 110:110682. [76] ZHENG L, WAN J, LONG Y, et al. Effect of high-frequency electric field on the tissue sticking of minimally invasive electrosurgical devices[J]. Royal Society Open Science, 2018, 5(7):180125. [77] WAN Jianfei, HAO Rufei, LONG Yunjiang, et al. Research on the variations of the incision efficiency and anti-sticking performance of PtFe-coated electrode with operation time[J]. Journal of Mechanical Engineering, 2018, 54(17):19-24. 万健飞, 郝汝飞, 龙运江, 等. PTFE涂层抗粘附电极切割效率和抗粘附性能的时变性研究[J]. 机械工程学报, 2018, 54(17):19-24. [78] ZHANG P, LIU G, ZHANG D, et al. Liquid-infused surfaces on electrosurgical instruments with exceptional ant adhesion and low-damage performances[J]. ACS Applied Materials and Interfaces, 2018, 10(39):33713-33720. [79] WU S, GAO D, LIANG Y, et al. Influence of non-smooth surface on tribological properties of glass fiber-epoxy resin composite sliding against stainless steel under natural seawater lubrication[J]. Journal of Mechanical Engineering, 2015, 28(6):1171-1176. [80] LI C, YANG Y, YANG L, et al. Biomimetic anti-adhesive surface microstructures on electrosurgical blade fabricated by long-pulse laser inspired by pangolin scales[J]. Micromachines, 2019, 10(12):816. [81] ZHANG P F, CHEN H W, ZHANG L W, et al. Anti-adhesion effects of liquid-infused textured surfaces on high-temperature stainless steel for soft tissue[J]. Applied Surface Science, 2016, 385:249-256. |
[1] | 汤勇, 孙亚隆, 唐恒, 万珍平, 袁伟. 柔性热管的研究现状与发展趋势[J]. 机械工程学报, 2022, 58(10): 265-279. |
[2] | 吴春亚, 郭闯强, 裴旭东, 王廷章, 陈妮, 陈明君. 太赫兹段慢波结构的微细加工技术研究新进展[J]. 机械工程学报, 2019, 55(7): 187-198. |
[3] | 朱永伟;邵健;苏楠;云乃彰. 同步超声振动调制微细放电-电解加工技术[J]. , 2014, 50(1): 185-192. |
[4] | 孙树峰;王萍萍;薛伟. 基于飞秒激光双光子的微齿轮加工技术研究[J]. , 2011, 47(23): 193-198. |
[5] | 汤勇;周明;韩志武;万珍平. 表面功能结构制造研究进展[J]. , 2010, 46(23): 93-105. |
[6] | 贾宝贤;边文凤;赵万生;王振龙. 微细孔超声加工关键技术[J]. , 2007, 43(11): 212-216. |
[7] | 李文卓;刘加光;于云霞. 微细电火花加工机床关键技术[J]. , 2007, 43(1): 170-175. |
[8] | 王明环;朱荻;张朝阳. 电化学腐蚀法加工微圆柱体[J]. , 2006, 42(6): 128-132. |
[9] | 李小海;王振龙;赵万生. 高频窄脉冲电流微细电解加工[J]. , 2006, 42(1): 162-167. |
[10] | 于建群;刘军山;王立鼎;郭丽莎. 塑料电泳芯片热键合的试验研究[J]. , 2005, 41(3): 185-188. |
[11] | 于建群;王立鼎;刘军山;郭丽莎. 塑料电泳芯片微结构模压的试验研究[J]. , 2004, 40(11): 93-97. |
[12] | 姚振强;Yao Y Lawrence;王飞;刘刚. 先进激光制造技术研究新进展[J]. , 2003, 39(12): 57-61. |
[13] | 刘立兵;赵毅;李明辉;潘伟. 基于RP技术的激光诱导选择性化学沉积微细加工技术的研究[J]. , 2003, 39(1): 137-142. |
[14] | 苑伟政;马炳和;李晓莹;李铁军;王丽戈;刘晶儒. 硅的准分子激光直写刻蚀微细加工特性研究[J]. , 2000, 36(3): 107-110. |
[15] | 融亦鸣;朱耀祥;罗振璧;章启成. 基于全部弹性变形原理的超精密微动工作台的实验研究[J]. , 1994, 30(5): 16-21. |
阅读次数 | ||||||
全文 |
|
|||||
摘要 |
|
|||||